Seiko Epson Corporation

Noboru Furuya

Masao Nakayama

Yutaka Arakawa

Yuichiro Tsuyuki

Eiju Hirai

Tomoaki Takahashi

Koji Ohashi

Satoshi Kimura

Akio Konishi

Atsushi Takakuwa

Hideki Hahiro

Hirofumi Kurosawa

Kimio Hirono

A method of manufacturing a piezoelectric actuator includes preparing a laminate including a substrate, a first electrode layer disposed on the substrate, a piezoelectric layer disposed on the first electrode layer, and a second electrode layer disposed on the piezoelectric layer, and forming a contour shape of the piezoelectric layer. The forming of the contour shape includes dry etching the piezoelectric layer from the second electrode layer side to dig the piezoelectric layer halfway in a thickness direction, covering, with a resist film, a dry etched surface formed on a side surface of the piezoelectric layer by the dry etching, and wet etching the piezoelectric layer from the second electrode layer side to dig the piezoelectric layer until the first electrode layer is reached.

Method of manufacturing piezoelectric actuator, piezoelectric actuator, and robot

A vibrator includes a vibrating part including a pair of vibrating plates and a piezoelectric material provided between the pair of vibrating plates, a supporting part including a pair of supporting plates and an interplate portion provided between the pair of supporting plates, and a wire provided in the vibrating part and the supporting part, wherein the wire is exposed from the supporting part.

Vibrator, piezoelectric actuator, piezoelectric motor, robot, electronic component conveyance apparatus, and manufacturing method of vibrator

A piezoelectric actuator includes a vibrating plate having a piezoelectric material, and a contact part provided in an end portion of the vibrating plate in contact with a driven part, wherein the contact part has a first portion in contact with the driven part and a second portion provided between the first portion and the vibrating plate and having lower rigidity than the first portion. Further, a width of the second portion in a direction crossing an arrangement direction of the first portion and the second portion is smaller than a width of the first portion in the crossing direction.

Piezoelectric actuator, piezoelectric motor, robot, and electronic component conveyance apparatus

An electric device includes an electric component that includes an electrode terminal which includes a projection portion, and a circuit substrate that includes a connected portion which is electrically connected to the projection portion, in which the connected portion includes a recess portion that is in contact with the projection portion.

Electric device, piezoelectric motor, robot, hand, and liquid transport pump

A piezoelectric device comprising a substrate having two surface sides; a vibration plate on one of the two surface side, a piezoelectric element including a first electrode provided on the vibration plate, a piezoelectric body layer provided on the first electrode, the piezoelectric body layer having a groove section on a side surface, the groove section including a first surface facing to the vibration plate, and a second electrode provided on the piezoelectric body layer, and a stress application film having tensile stress and provided on an inner surface of the groove section.

Piezoelectric device, liquid ejecting head, liquid ejecting apparatus and manufacturing method of piezoelectric device

A liquid ejecting head which includes a piezoelectric element which includes a first electrode, a piezoelectric layer which is provided on the first electrode, and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, and a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element, in which a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a first direction and a second direction which cross a third direction which goes from the first electrode to the second electrode.

Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and ultrasonic sensor

A flow channel substrate has pressure chambers, and the pressure chambers communicate with nozzle openings configured to eject liquid. Each of piezoelectric elements on the flow channel substrate has a piezoelectric layer, a pair of electrodes, and a wiring layer coupled to the electrodes. The wiring layer has a first layer on the flow channel substrate side and a second layer on the first layer. The first layer contains palladium and is formed by pretreatment, whereas the second layer contains nickel and is formed by electroless plating.

Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and method for manufacturing piezoelectric element

There is provided a liquid ejecting head including: a flow path formation substrate on which a pressure generation chamber communicating with nozzle openings for discharging liquid is provided; and a piezoelectric element which is provided on the flow path formation substrate and includes a piezoelectric layer, an electrode, and a wiring layer connected to the electrode, in which the wiring layer includes an adhesion layer which is provided on the electrode side and contains at least titanium and tungsten, and a conductive layer containing copper which is provided on a side of the adhesion layer opposite the electrode.

Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and manufacturing method thereof

A liquid droplet ejecting head includes a fluid path forming substrate having a fluid path communicating with nozzle holes and a diaphragm on the fluid path forming substrate. The diaphragm has a first surface facing a second surface. A piezoelectric element on the first surface of the diaphragm has a piezoelectric body layer interposed between a first electrode and a second electrode. A support substrate on the first surface of the diaphragm has a space for containing the piezoelectric element. The support substrate includes a first member formed on the first surface of the diaphragm, and a second member formed on the first member. The first member has a first opening for containing the piezoelectric element. The space of the support substrate is defined by the first opening of the first member and the second member. The main material of the first member is resin.

Liquid droplet ejecting head, method for manufacturing the same, and liquid droplet ejecting apparatus

A piezoelectric element including: a first electrode, a piezoelectric layer formed above the first electrode to have a longitudinal direction and a transverse direction, and a second electrode formed above the piezoelectric layer, wherein at least a part of a side surface of the piezoelectric layer in the transverse direction is a concavo-convex surface, and a width of the piezoelectric layer in the transverse direction from the second electrode to the first electrode changes with the concavo-convex surface.

Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric element includes a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a resin layer that covers at least the side surfaces of the first electrode. The first electrode includes a metal layer and an anti-oxidation layer. The metal layer is formed of a base metal. The anti-oxidation layer is disposed between the metal layer and the piezoelectric layer to prevent contact between the metal layer and the piezoelectric layer.

Piezoelectric element, piezoelectric actuator, droplet-ejecting head, droplet-ejecting apparatus, and method for manufacturing piezoelectric element

A method of manufacturing an inkjet head includes laminating a first separation film on a substrate and laminating a second separation film on the first separation film. A lower structure having a pressure chamber storing ink and an ink ejecting nozzle is formed independently of the substrate. An upper structure having an actuator changing the pressure of the pressure chamber to eject ink is formed on the second separation film with a liquid or vapor phase method. Grooves are formed in the upper structure extending from an upper surface of the upper structure to an interface between the first separation film and the second separation film. A separation liquid applied to the interface at a region exposed by the grooves separates the first and second separation films to release the upper structure from the substrate. The upper structure and the lower structure are then joined together.

Method for manufacturing inkjet head

A method for manufacturing an inkjet head having a pressure chamber that stores ink, a nozzle that is provided at the pressure chamber and ejects the ink, and an actuator that changes an internal pressure of the pressure chamber to eject the ink in the pressure chamber through the nozzle. The method includes the steps of: forming the actuator on a substrate by using one of a liquid phase method and a vapor phase method to manufacture an upper structure; separating the upper structure from the substrate; forming a lower structure having the pressure chamber with metallic glass, independently of the substrate; and joining the upper structure and the lower structure.

Method for manufacturing inkjet head, and inkjet head

A method for manufacturing an insert die with a pattern region to be transferred onto a molding part is provided. The method includes (a) adhering a first base member having the pattern region and a second base member with an adhesive material, and (b) sealing an exposed portion of the adhesive material by a metal film.

Insert dies, molds, and methods for fabricating the same

A glass substrate is affixed through an UV-hardening resin to the signal face of an optical stamper and is examined using an optical head having optical constants equivalent to those of a disk examination machine, thus making it possible to obtain characteristic playback examination results equivalent to those obtained from disks manufactured using the optical stamper, wherefore optical stamper quality can be easily assessed.

Growing community of inventors

Chino, Japan

Noboru Furuya