Mitsubishi Materials Corporation

Noboru Chikusa

Teruhisa Kitagawa

Masaki Ito

Takanori Ito

Masaki Itoh

An apparatus for producing single crystal silicon comprising: an induction heating coil that is disposed around the polycrystalline silicon rod for fusing the polycrystalline silicon rod; an exothermic ring that has a quartz-coated member covering the conductive member; a support member that supports the exothermic ring and passes through a wall of the housing in a rotatable manner; an operating device that rotates the support member and reciprocates the exothermic ring between a heating position where the exothermic ring is positioned close to the induction heating coil and a stand-by position where the exothermic ring is receded from the heating position; a sealing member that is provided between the wall of the housing and the support member and maintains the hermitic therebetween; and a cooling flow path that is formed in the support member and flows a cooling medium.

Apparatus for producing single crystal silicon

The problem to be solved is to provide an analysis apparatus and analysis method of chlorosilanes capable of stably carrying out an analysis with less contamination. An analysis apparatus of chlorosilanes includes a vaporizerfor vaporizing chlorosilanes L and an analyzer for analyzing materials rand rremained by vaporizing. In the analysis apparatus, the vaporizerincludes a hotplate, a coverdetachably attached onto the hotplateand configuring a heating chamberwith the hotplate, and a sample vesselarranged in the heating chamberand having an opening upside capable of storing the chlorosilanes L. The coverincludes a supply portfor supplying an inert gas or nitrogen gas into the heating chamberand a discharge portfor discharging gases in the heating chamber

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Yokkaichi, Japan

Noboru Chikusa