Samsung Electronics Co., Ltd.

No Ui Kim

Seung Hoon Choi

Bo Un Yoon

Ja Eung Koo

Tae Min Earmme

Youn Cheol Jeong

Hyun Kyo Seo

Substrate cleaning equipment includes a substrate holder which supports a substrate, a swing body, a head, a first cleaning liquid supply structure, and a second cleaning liquid supply structure. The swing body moves along a sweep line on a main surface of the substrate. The head is coupled to the swing body and includes a pad attachment surface facing the substrate holder. The first cleaning liquid supply structure is coupled to the swing body and sprays a first cleaning liquid onto the main surface of the substrate. The second cleaning liquid supply structure sprays a second cleaning liquid onto the main surface of the substrate. A buffing pad is attached to the pad attachment surface.

Substrate cleaning equipment, substrate treatment system including the same, and method of fabricating semiconductor device using the substrate cleaning equipment

Growing community of inventors

Suwon-si, South Korea

No Ui Kim