Semes Co., Ltd.

No Jae Park

Hyi Jae Kang

Jun Chul Park

Seul Lee

Provided are a flow supply apparatus and supply method. The flow supply apparatus, comprising: a rail; a transport unit disposed on the rail, where an object is loaded; and a gas treatment unit provided on the transport unit and configured to purge the object. The object includes a FOUP with a substrate accommodated therein, and fume is removed from the substrate through the purging.

Flow supply apparatus and supply method

The present disclosure provides an article storage apparatus and a method of controlling the same, which are capable of compensating for a position of a shelf part. The present disclosure may provide an article storage apparatus and a method of controlling the same, which include a method of performing teaching on a shelf in a rotation direction and then performing teaching on a transport robot at the time of performing the teaching on the shelf of the article storage apparatus, thereby implementing high precision and a low teaching failure rate.

Article storage apparatus and method of controlling the same

An article transferring apparatus includes a vehicle configured to travel along a travel rail installed on a ceiling, a vehicle main body connected to the vehicle and defining loading spaces in which articles are to be loaded, and a hoist module including a grip unit configured to grip a desired one of the articles and load and unload the articles to/from the loading spaces.

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Seoul, South Korea

No Jae Park