Applied Materials, Inc.

Applied Materials Israel Limited

Carl Zeiss Microscopy Gmbh

Carl Zeiss Smt Gmbh

Nissim Elmaliach

Ron Naftali

Haim Feldman

Silviu Reinhorn

Emanuel Elyasaf

Boris Golberg

Alon Litman

Steven Robert Rogers

Emanuel Elyasef

Meir Aloni

Doron Meshulach

Yonatan Lehman

Mula Friedman

Haim Eder

Igor Krayvitz (Krivts)

Mario Mützel

Mario MÜTZEL

Igor Krayvits

Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.

Multi-spot collection optics

A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

Optical spot grid array scanning system

A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

Spot grid array scanning system

A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.

Wafer defect detection system with traveling lens multi-beam scanner

Data converter apparatus for converting in real time data stored in an input compact format into an output expanded real time format. The data including a plurality of groups and repetition of the groups. The groups including, each, many basic geometric figures (BGF). The data converter includes a processor adapted to selecting data relating to a predetermined division, dividing and processing the data into consecutive bins according to scan order, which bins have structural correspondence to the input format. The data converter is further capable of sub-dividing the division into sub-divisions which have structural correspondence to the output format. The data processor is further capable of processing and allocating the BGFs in the bins to sub-divisions to thereby produce a division data stream in the output expanded real time format.

Data converter apparatus and method particularly useful for a database-to-object inspection system

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Raanana, Israel

Nissim Elmaliach