Applied Materials, Inc.

Nisha Prakash Holla

Anantha K Subramani

Kartik Bhupendra Shah

Hamid Noorbakhsh

Vijaykumar Krithivasan

An apparatus and method for cooling a gas distribution assembly with a cooling plate. The cooling plate having a body having a top surface, an outer perimeter, a center, an inner zone and an outer zone. A plurality of channels formed through the top surface. The plurality of channels having a first outer channel having one or more first outer channel segments configured for flowing a first cooling fluid from a cooling fluid inlet to a cooling fluid outlet and a first inner channel disposed between the first outer channel and the center having one or more first inner channel segments configured for flowing a second cooling fluid from a cooling fluid inlet to a cooling fluid outlet wherein flow in adjacent segments is in an opposite direction.

Growing community of inventors

Bengaluru, India

Nisha Prakash Holla