International Business Machines Corporation

Nirmal S Sandhu

Nabil A Rizk

You-Wen Yau

William T Grant

Michael Emery Brown

Mark William Kapfhammer

Robert H Anders, Jr

Mohamad A Sarfaraz

William Cobbett, Jr

Method for thermally-machining large area features, and screen-depositing metallurgy on a ceramic dielectric greensheet. The method comprises an improvement over the conventional integrated disposable mask process, and involves the steps of outlining the large feature areas through a masking film laminated to a greensheet, using a high intensity energy beam such as a laser beam, electron beam, photon beam, etc, forming a stencil sheet having corresponding large area feature openings, and laminating the stencil sheet in registration over the masking film. An adhesive sheet is pressed against the back of the stencil sheet, through the stencil openings, to adhere to the outline features on the masking film and to remove them when the stencil sheet is separated from the masking film. Conductive paste is applied to the greensheet, through the large feature openings in the masking film, and the electroded greensheet is fired for use in preparing multi-layer ceramic packages.

Method for machining and depositing metallurgy on ceramic layers

A debris control system is provided for an electron-beam drilling apparatus having a chamber encompassing a drilling area and a calibration area. The debris control system includes a calibration-area shielding assembly which shields a calibration area of such apparatus from drilling-generated debris and an isolation assembly which isolates drilling-generated debris within such drilling area.

Debris control system

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Hopewell Junction, NY, United States of America

Nirmal S Sandhu