International Business Machines Corporation

Advanced Micro-Fabrication Equipment Inc. China

Advanced Micro-Fabrication Equipment Inc, Shanghai

Shanghai Pharmaceuticals Holding Co., Ltd.

Ning Zhou

Yong Jiang

Tuqiang Q Ni

Yi Xu

Liang Zhao

Henry Ho

CheKim Chhuor

Guangxin Xia

Yanjun Liu

Rason Zuo

Dee Wu

Di Li

Zhiyou Du

Hai Zhong

Jiansheng Han

Yuejun Gong

Kelvin Chen

Ao Chen

The present invention relates to a dual-station vacuum processor that pumps uniformly, comprising two vacuum processing chambers that may act as a process processing chamber, and an offset-pumping port and a vacuum pump which are common to and communicate with the two vacuum processing chambers, wherein a damper having a set thickness in a vertical direction is provided in a region proximal to the offset-pumping port in each vacuum processing chamber, so as to lower a pumping rate of gas at the pumping port proximal end and balance the pumping rate with the pumping rate of the gas at the pumping port distal end, thereby ameliorating the impact of chamber offset on the uniformity process processing. The present invention may further provide, in a rib as the damper, a channel in communication with the atmospheric environment outside of the chamber, so as to facilitate connection between a cable pipeline in the chamber and the outside.

Uniform pumping dual-station vacuum processor

A salt of a quinazoline derivative (N-[4-(3-chlorine-4-fluoroanilino)]-7-(3-morpholinepropanol)-6-(2-fluoroacrylamide)-quinazoline, the structure thereof is as represented by formula I). Compared with a known quinazoline derivative, the salt of the quinazoline derivative has one or more improved properties and at least has better water solubility, wherein a citrate, a benzene sulfonate, and an ethanedisulphonate thereof further have better crystallinity and are not easy to absorb moisture. 

Salt of quinazoline derivative, preparation method therefor and application thereof

The present application provides a gas showerhead including a gas distribution and diffusion plate and a water cooling plate, the gas distribution and diffusion plate includes several columns of first gas diffusion passages connecting to a first reactant gas source and several columns of second gas diffusion passages connecting to a second reactant gas source; the water cooling plate having cooling liquid passages is arranged below the gas distribution and diffusion plate, and the water cooling plate is provided with first gas outlet passages provided for the reactant gas in the first gas diffusion passages to flow out and second gas outlet passages provided for the reactant gas in the second gas diffusion passages to flow out, so as to isolatedly feed at least two reactant gases into a reaction chamber.

Gas showerhead, method for making the same and thin film growth reactor

A method, apparatus, and computer program product are provided for activating a blade server in a blade server system. The method comprises receiving a request for activating the blade server and obtaining a hardware feature of the blade server. The method further comprises determining a virtual machine management program corresponding to the hardware feature of the blade server in accordance with a correspondence relationship between the hardware feature of the blade server and the virtual machine management program and remotely activating the blade server via a management bus by using the determined virtual machine management program. In accordance with the method, a suitable built-in virtual machine management program may be determined according to user requirements, and system security and stability upon blade server activation may be ensured.

Activating a blade server in a blade server system

Growing community of inventors

Shanghai, China

Ning Zhou