Innovusion, Inc.

Kla Tencor Corporation

Kla-tencor Technologies Corporation

Ning-Yi Neil Wang

Junwei Bao

Yimin Li

Haosen Wang

Hidong Kwak

Torsten Rudolf Kaack

Yufeng Li

Peng Wan

Ward RDell Dixon

Jagjit Sandhu

Ching-Ling Meng

Anthony Tang

Gil Salman

Torsten Kaack

A rotatable optical reflector device of a Light Detection and Ranging (LiDAR) scanning system used in a motor vehicle is disclosed. The rotatable optical reflector device comprises a glass-based optical reflector including a plurality of reflective surfaces and a flange. The rotatable optical reflector device further comprises a metal-based motor rotor body at least partially disposed in an inner opening of the glass-based optical reflector. The rotatable optical reflector device further comprises an elastomer piece having a first surface and a second surface. The first surface of the elastomer piece is in contact with a second mounting surface of the flange. The rotatable optical reflector device further comprises a clamping mechanism compressing the elastomer piece at the second surface of the elastomer piece, wherein movement of the metal-based motor rotor body causes the glass-based optical reflector to optically scan light in a field-of-view of the LiDAR scanning system.

Attaching a glass mirror to a rotating metal motor frame

An apparatus of a light detection and ranging (LiDAR) scanning system for at least partial integration with a vehicle is disclosed. The apparatus comprises an optical core assembly including an oscillating reflective element, an optical polygon element, and transmitting and collection optics. The apparatus includes a first exterior surface at least partially bounded by at least a first portion of a vehicle roof or at least a portion of a vehicle windshield. A surface profile of the first exterior surface aligns with a surface profile associated with at least one of the first portion of the vehicle roof or the portion of the vehicle windshield. A combination of the first exterior surface and the one or more additional exterior surfaces form a housing enclosing the optical core assembly including the oscillating reflective element, the optical polygon element, and the transmitting and collection optics.

Compact lidar systems for vehicle contour fitting

A compact LiDAR device is provided. The compact LiDAR device includes a first mirror disposed to receive one or more light beams and a polygon mirror optically coupled to the first mirror. The polygon mirror comprises a plurality of reflective facets. For at least two of the plurality of reflective facets, each reflective facet is arranged such that: a first edge, a second edge, and a third edge of the reflective facet correspond to a first line, a second line, and a third line; the first line and the second line intersect to form a first internal angle of a plane comprising the reflective facet; and the first line and the third line intersect to form a second internal angle of the plane comprising the reflective facet. The first internal angle is an acute angle; and the second internal angle is an obtuse angle.

Compact LiDAR design with high resolution and ultra-wide field of view

An isolation system for a light detection and ranging (LiDAR) optical core assembly is provided. The LiDAR optical core assembly comprises a polygon-motor rotating element, an oscillating reflective element, and transmitting and collection optics. The isolation system comprises a polygon-motor base element coupled to the polygon-motor rotating element and a plurality of isolators substantially fixed to the polygon-motor base element and disposed relative to each other around a spatial location determined based on a center of gravity of at least one of the optical core assembly and the polygon-motor rotating element. The plurality of isolators is adapted to mitigate acoustic noise caused by at least the polygon-motor rotating element during operation of the optical core assembly.

Systems and apparatuses for mitigating LiDAR noise, vibration, and harshness

A local purging tool for purging a portion of a surface of a wafer with purging gas is disclosed. The purging tool includes a purging chamber configured to contain purging gas within a cavity of the purging chamber, a permeable portion of a surface of the purging chamber configured to diffuse purging gas from the cavity of the chamber to a portion of a surface of a wafer, and an aperture configured to transmit illumination received from an illumination source to a measurement location of the portion of the surface of the wafer and further configured to transmit illumination reflected from the measurement location to a detector.

Atmospheric molecular contamination control with local purging

Gas purge systems and methods and a spectroscopic ellipsometer are disclosed. A purge gas system may include an input beam optics housing, a collection optics housing and a gas purge manifold. The input beam optics housing may include a first gas flow path between a first gas inlet and an aperture in a first nose cone proximate a measurement position. The collection optics housing may include a second gas flow path between a second gas inlet and an aperture in a second nose cone proximate the measurement position. The gas purge manifold may be disposed between the input beam optics housing and the collection optics housing. The gas purge manifold has a third gas flow path between a third gas inlet and an aperture in the gas manifold proximate the measurement position. The ellipsometer may include input beam optics in the input beam optics housing and collection optics in the collection optics housing. First, second, and third flows of purge gas may be supplied through the input beam optics housing, collection optics housing and gas purge manifold respectively. The purge gas is delivered directly to a measurement position of a surface of a substrate through the gas purge manifold, the first nosecone and the second nose cone.

Growing community of inventors

Fremont, CA, United States of America

Ning-Yi Neil Wang