Stmicroelectronics S.r.l.

Stmicroelectronics Gmbh

Stmicroelectronics International N.v.

Autoliv Development Ab

Pgs Geophysical As

Acreo Swedish Ict Ab

Rise Acreo Ab

Rise Acreo Ae

Rise Research Institutes of Sweden Ab

Nils Einar Hedenstierna

Gert Ingvar Andersson

Carlo Valzasina

Matteo Fabio Brunetto

David Westberg

Huantong Zhang

Erik Svensson

Borys Stoew

Erik Daniel Svensson

Mats Carlsson

Milena Anguelova

Per Svensson

Alexandra Nafari

Sjoerd Haasl

Gert Andersson

Zhang Huantong

A gyroscope includes a substrate, a first structure, a second structure and a third structure elastically coupled to the substrate and movable along a first axis. The first and second structure are arranged at opposite sides of the third structure with respect to the first axis A driving system is configured to oscillate the first and second structure along the first axis in phase with one another and in phase opposition with the third structure. The first, second and third structure are provided with respective sets of sensing electrodes, configured to be displaced along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis.

Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate

The present invention relates to a gyroscope sensor for detecting a rotational motion about a sensitivity axis and comprising means for quadrature compensation. The gyroscope sensor comprises a total inertial mass comprising a first inertial mass and a second inertial mass physically attached to each other and arranged such that a rotation of the first inertial mass about a detection axis caused by the coriolis force when the gyroscope sensor is subjected to a rotation about a sensitivity axis. The gyroscope further comprises a first drive structure having a displaceable drive frame which may cause a respective of the first or second inertial mass to rotate about the detection axis in order to compensate for quadrature errors originating from faulty coupling between a drive mode and a sense mode of the gyroscope sensor.

Quadrature compensation method for MEMS gyroscopes and a gyroscope sensor

A sensor is disclosed for detecting a rotational motion about a resulting sensitivity axis. The sensor includes at least two dual mass gyroscope units, each of the gyroscope units are adapted to detect a rotational motion about a sensitivity axis of the respective gyroscope unit. The sensitivity axes being parallel to each other and to the resulting sensitivity axis. The gyroscope units are interconnected at the inertial masses of the gyroscope units which cause the gyroscope unit to operate synchronously.

MEMS gyro

A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.

Device for measuring force components, and method for its production

A modulator is provided in operative engagement with a sensor element having a plurality of electrodes. The modulator has a single-bit quantizer electrically connected to a digital accumulator. The accumulator accumulates output information received from the single-bit quantizer. The accumulator converts the accumulated output information received from the single-bit quantizer to a multi-bit feedback signal and sends the multi-bit feedback signal in a primary feedback loop back to the sensor element. The quantizer sends a single-bit feedback signal in a secondary feedback loop back to a point before the quantizer.

Method for using a sensor system having a single-bit quantizer and a multi-bit feedback loop

In a sensor for measuring angular velocity a body is formed from a planer substrate The body defines a beam, the opposed ends of which are adapted to be fixed in position, the beam having a preferential bending direction which makes an acute angle with the plane of the planar substrate. The beam carries an inertia mass comprising two arms interconnected by a connecting bar, the central part of the connecting bar being formed integrally with part of the beam. Capacitative plates located adjacent a conductive layer on the arms are provided with potentials which cause the inertia mass to rotate about the axis of the connecting bar with a &ldquo;see-saw&rdquo; action which, because of the configuration of the beam leads to a rotational oscillation of the inertia mass in the plane of the substrate. If the arrangement is rotated about an axis coincident with the connecting bar, the inertia mass rotates about an axis coincident with the beam with an oscillating rotation. This is detected by capacitative plates to determine angular velocity.

Arrangement for measuring angular velocity

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Vastra Frolunda, Sweden

Nils Einar Hedenstierna