Applied Materials, Inc.

Nilesh Mistry

Nitin K Ingle

Christopher L Beaudry

Lok Kee Loh

Laksheswar Kalita

Jonathan J Strahle

Exemplary methods for a coating a component of a semiconductor processing system may include forming a nickel-containing alloy on an exposed surface the component of the semiconductor processing system. The methods may include forming plasma effluents of a fluorine-containing precursor. The methods may include contacting the nickel-containing alloy with the plasma effluents of the fluorine-containing precursor. The contacting may fluorinate a portion of the nickel-containing alloy to form a nickel-and-fluorine-containing material overlying the nickel-containing alloy.

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Hayward, CA, United States of America

Nilesh Mistry