Corning Incorporated

Nikolaus Boos

Steven Bruce Dawes

Sophie A Vallon

Mark D Salik

Guilhem Alibert

A passive temperature-compensated integrated optical component having an array of adjacent waveguides, and a slab waveguide located within a groove at an intermediate section of the array. The waveguides have an index of refraction that increases with increasing temperature, and the slab waveguide has an index of refraction that decreases with increasing temperature. The slab waveguide compensates for a temperature-induced change in the refractive index of the waveguides to maintain a generally constant optical path difference between the adjacent waveguides over a temperature range.

Phasar athermalization using a slab waveguide

A method of fabricating a grating in a planar optical device by fabricating a surface grating or by photoinscription. For surface gratings, a method comprises providing a substrate material that includes a substrate layer, a first core layer, a second core layer, and a first photoresist layer. An exposure of a grating and a plurality of alignment marks is formed onto the substrate material. The second core layer is etched to form the grating in the second core layer. A second photoresist layer is deposited on the substrate material that remains after the first etching. An exposure of a waveguide pattern is formed in the first core layer. The first core layer is etched to define a first waveguide in the first core layer, where the first waveguide includes a first portion having the surface grating. For photoinscription, the fabrication method comprises providing a substrate material that includes a substrate layer, a core layer, and a first photoresist layer. A first photo-mask that includes a plurality of alignment marks is disposed between the first photoresist and a light source. An exposure of the first photo-mask is performed and the alignment marks are etched into the core layer. A grating is written into the core layer by a photosensitive effect. A second photoresist layer is deposited on the substrate material and an exposure of a waveguide pattern is formed in the core layer. The core layer is etched to define a first waveguide in the core layer, where the first waveguide includes a first portion having the surface grating.

Growing community of inventors

Fontainbleau, France

Nikolaus Boos