Oxford Instruments Technologies Oy

Microsoft Technology Licensing, LLC

Nikolai Chekurov

Risto Mutikainen

Esa Tapani Räikkönen

Anton Viljami Autere

Zhengjung Liu

A method for balancing pulse energies across a series of write beams in an optical data writer comprises: (a) for each write beam of the series, applying an independently controllable phase delay to the write beam, thereby changing the polarization of the write beam; and (b) for each write beam with changed polarization in the series, directing a selected plane-polarized component of the write beam through a data modulator and onto an optical substrate. In this method the data modulator modulates each write beam of the series irrespective of the tolerance across the series of write beams.

Beam balancer for optical data writing

According to an example aspect of the present invention, there is provided a radiation window manufacturing method, comprising patterning a mask on a top surface of a bulk wafer or compound wafer, etching the bulk or compound wafer from the top surface, based on the mask, either by timed etching of the bulk wafer, or until an inner insulator layer of the compound wafer, thereby generating recesses in the bulk or compound wafer, filling the recesses, at least partly, with a filling material, polishing the top surface of the bulk or compound wafer, and providing a membrane layer on the polished top surface, and etching the bulk or compound wafer from a bottom surface, opposite the top surface, to build a supporting structure for the membrane layer in accordance with a shape defined by the mask.

Radiation window

According to an example aspect of the present invention, there is provided a method comprising obtaining a first silicon wafer comprising a mask on a first side, attaching a second silicon wafer on the first side of the first silicon wafer, and etching one of the wafers to partially expose a window layer deposited on the opposite silicon wafer and to leave a structure defined by the mask supporting the window layer.

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Helsinki, Finland

Nikolai Chekurov