Facebook Technologies, LLC

Meta Platforms Technologies, LLC

Nihar Ranjan Mohanty

Matthew E Colburn

Giuseppe Calafiore

Matthieu Charles Raoul Leibovici

Austin Lane

Ningfeng Huang

Pasi Saarikko

Hee Yoon Lee

Yu Shi

Robin Sharma

Karol Constantine Hatzilias

Ankit Vora

Elliott Franke

Andrew John Ouderkirk

Qi Zhang

Afsoon Jamali

Ming Lei

John Goward

Selso Luanava

Sho Nakahara

Carl Chancy

An optical assembly is configured to receive visible scene light at the backside of the optical assembly and to direct the visible scene light on an optical path toward the eyeward side. The optical assembly includes a dimming element disposed on the optical path, where the dimming element includes a photochromic material that is configured to darken in response to exposure to a range of light wavelengths. A display layer is disposed on the optical path between the eyeward side of the optical assembly and the dimming element. The display layer is configured to direct visible display light toward the eyeward side and also to direct activation light to the dimming element, where the activation light is within the range of light wavelengths to activate a darkening of the photochromic material to dim the visible scene light.

Dimming control with display-directed activation light for an optical assembly

Gray-tone lithography techniques for controlling the thickness profile of an overcoat layer on a surface-relief grating that has a non-uniform grating parameter (e.g., depth, duty cycle, or period), compensating for the non-uniform etch rate in a large area, defining etch/block regions, and/or controlling the thickness of the grating layer.

Gray-tone lithography for precise control of grating etch depth

A manufacturing system performs a deposition of an etch-compatible film over a substrate. The etch-compatible film includes a first surface and a second surface opposite to the first surface. The manufacturing system performs a partial removal of the etch-compatible film to create a surface profile on the first surface with a plurality of depths relative to the substrate. The manufacturing system performs a deposition of a second material over the profile created in the etch-compatible film. The manufacturing system performs a planarization of the second material to obtain a plurality of etch heights of the second material in accordance with the plurality of depths in the profile created in the etch-compatible film. The manufacturing system performs a lithographic patterning of a photoresist deposited over the planarized second material to obtain the plurality of etch heights and one or more duty cycles in the second material.

Gratings with variable depths formed using planarization for waveguide displays

Techniques related to reclamation of energy leaking from waveguides are disclosed. One or more photovoltaic cells may receive light leaking from a waveguide at a first surface of the wave guide. The first surface may be opposite to a second surface at which an in-coupling element is located. The light leaking from the waveguide results from inefficiency in redirecting incoming light for propagation within the waveguide. The one or more photovoltaic cells may generate electric power from the light leaking from the waveguide.

Reclamation of energy leaking from waveguides

Disclosed herein are techniques for eye illumination for eye position tracking. An illuminator for eye tracking includes a substrate configured to be placed in front of an eye of a user and a light source positioned on a surface of the substrate. The light source is configured to be positioned within a field of view of the eye of the user. A maximum dimension of the light source in a plane parallel to an emission surface of the light source is less than 500 &#x3bc;m.

In-field illumination for eye tracking

A pupil replication waveguide for a projector display includes a slab of transparent material for propagating display light in the slab via total internal reflection. A diffraction grating is supported by the slab. The diffraction grating includes a plurality of tapered slanted fringes in a substrate for out-coupling the display light from the slab by diffraction into a blazed diffraction order. A greater portion of the display light is out-coupled into the blazed diffraction order, and a smaller portion of the display light is out-coupled into a non-blazed diffraction order. The tapered fringes result in the duty cycle of the diffraction grating varying along the thickness direction of the diffraction grating, to facilitate suppressing the portion of the display light out-coupled into the non-blazed diffraction order.

Outward coupling suppression in waveguide display

A method is described for utilizing NIL materials with switchable mechanical properties. The method comprises applying an imprint mask to a nano-imprint lithography (NIL) material layer. The NIL material layer is comprised of a NIL material with a modulus level below a flexibility threshold. The NIL material layer has an internal property, that when changed, causes a change in the modulus level of the NIL material. The method further comprises detaching the imprinted NIL material layer from the imprint mask, with the low modulus level of the NIL material causing a shape of the imprinted NIL material layer to remain unchanged after detachment. A modulus level of the NIL material is increased by changing an internal property of the NIL material, with the modulus level increased beyond a strength threshold to create a first imprint layer that has a structure that remains unaffected by a subsequent process.

Nanoimprint lithography material with switchable mechanical properties

Techniques for producing an overcoat layer on slanted surface-relief structures and devices obtained using the techniques are disclosed. In some embodiments, a method of planarizing an overcoat layer over a surface-relief structure includes removing a portion of the overcoat layer using an ion beam at a glancing angle. The overcoat layer includes planar surface portions and non-planar surface portions. Each of the non-planar surface portions includes a first sloped side and a second sloped side facing the first sloped side. The glancing angle is selected such that the first sloped side of each non-planar surface portion is shadowed from the ion beam by an adjacent planar surface portion such that the ion beam does not reach at least the first sloped side of each non-planar surface portion but reaches the second sloped side of each non-planar surface portion.

Planarization of overcoat layer on slanted surface-relief structures

Techniques for overcoating slanted structures and devices obtained using the techniques are disclosed. In some embodiments, a method of forming an overcoat layer on a surface-relief structure on a substrate includes receiving the substrate with the surface-relief structure. The surface-relief structure includes a plurality of ridges slanted with respect to the substrate, and a plurality of grooves each between two adjacent ridges. The method further includes depositing, in each cycle of a plurality of cycles, a uniform layer of an overcoat material on surfaces of the plurality of ridges and bottoms of the plurality of grooves. The deposited layers of the overcoat material and the plurality of ridges collectively form a light-coupling structure on the substrate. A surface of the overcoat layer is planar.

Overcoating slanted surface-relief structures using atomic layer deposition

A surface-relief grating includes a base surface-relief grating comprising a plurality of ridges that include a first material, and a second material on only a top surface or a single sidewall of each ridge of the plurality of ridges, where the second material is different from the first material. A method of fabricating the surface-relief grating includes etching or molding a base surface-relief grating that includes a plurality of ridges, depositing a material layer on the plurality of ridges, and selectively etching the material layer to increase a height or a slant angle of an edge of a ridge in the plurality of ridges to make the surface-relief grating that includes the base surface-relief grating.

Duty cycle, depth, and surface energy control in nano fabrication

A method is described for modifying the mechanical properties of NIL materials. The method includes applying an imprint mask to a nano-imprint lithography (NIL) material layer to create an imprinted NIL material layer, with the NIL material layer comprised of a NIL material. The method further includes detaching the imprinted NIL material layer from the imprint mask, with the modulus level of the NIL material below a flexibility threshold to cause a shape of the imprinted NIL material layer to remain unchanged after detachment. The modulus level of the NIL material of the imprinted NIL material layer is increased beyond a strength threshold to create a first imprint layer, with the imprint layer having a structure that remains unaffected by a subsequent process to form a second imprint layer matching a master mold pattern.

Nanoimprint lithography processes for switching mechanical properties of imprint materials

A surface-relief structure and techniques for fabricating the surface-relief structure are disclosed. The surface-relief structure includes a substrate, a plurality of ridges on the substrate, and a plurality of grooves each between two adjacent ridges. The plurality of ridges are slanted with respect to the substrate, and include a material having a refractive index at least 2.3. Regions of the substrate at bottoms of the plurality of grooves include at least one of hydrogen or nitrogen at a concentration of at least 10/cm.

Hydrogen/nitrogen doping and chemically assisted etching of high refractive index gratings

A manufacturing system performs a deposition of an etch-compatible film over a substrate. The etch-compatible film includes a first surface and a second surface opposite to the first surface. The manufacturing system performs a partial removal of the etch-compatible film to create a surface profile on the first surface with a plurality of etch heights relative to the substrate. The manufacturing system performs a lithographic patterning of a photoresist deposited over the created profile in the etch-compatible film to obtain the plurality of etch heights and one or more duty cycles corresponding to the etch-compatible film deposited over the substrate.

Gratings with variable etch heights for waveguide displays

A method is described for creating a modified mask with low surface energies for a nano-imprint lithography (NIL) imprinting process. The method includes applying a master mold to an imprint mask material to create an imprint mask. The method further includes modifying the imprint mask by applying a treatment to the imprint mask to cause a surface energy level of the imprint mask to fall below a sticking threshold. The modified imprint mask is applied to a nano-imprint lithography (NIL) material to create an imprinted NIL material layer. The surface energy level of the imprint mask causes a shape of the imprinted NIL material layer to be remain unchanged when the imprinted NIL material layer is detached from the modified imprint mask.

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Snoqualmie, WA, United States of America

Nihar Ranjan Mohanty