Sophion Bioscience A/s

Pulse Mems Aps.

Niels Bent Larsen

Matthias Mullenborn

Ib Johannsen

Esben Kjaer Unmack Larsen

Pirmin Hermann Otto Rombach

A single-step method for applying a coating to a polymeric substrate comprising: exposing a photoreactive compound and a polymeric compound in an aqueous solvent to ultraviolet radiation in the presence of the polymeric substrate to obtain a covalently bound coating thereon comprising a reaction product of the photoreactive compound and the polymeric compound. More particularly, a method of applying a coating to a polymeric substrate in order to reduce the adsorption of analytes in solution to the substrate by imparting properties to the substrate similar to the properties of the coating applied.

Method for applying a coating to a polymeric substrate

A method of providing at least part of a diaphragm and at least a part of a back-plate of a condenser microphone with a hydrophobic layer so as to avoid stiction between said diaphragm and said back-plate. The layer is deposited via a number small of openings in the back-plate, the diaphragm and/or between the diaphragm and the back-plate. Provides a homogeneous and structured hydrophobic layer, even to small internal cavities of the microstructure. The layer may be deposited by a liquid phase or a vapor phase deposition method. The method may be applied naturally in continuation of the normal manufacturing process. Further, a MEMS condenser microphone is provided having such a hydrophobic layer. The static distance between the diaphragm and the back-plate of the microphone is smaller than 10 &#x3bc;m.

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Rødovre, Denmark

Niels Bent Larsen