Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno

Mecal B.v.

Niek Rijnveld

Teunis Cornelis Van Den Dool

Hamed Sadeghian Marnani

Rens Van Den Braber

Petrus Rufus Fraanje

An active vibration isolation and damping system () comprising a payload () that has to be isolated or damped, a vibration sensor () for detecting a vibration of the payload, an actuator () for moving the payload relative to a bearing body () supporting the payload, and a controller () for providing the actuator with a signal that is representative for the vibration. The system provides a solution for the tilting problem by applying a vibration sensor that has a low stiffness connection to the payload () for rotation along an axis () perpendicular to the gravitational force (), and a high stiffness connection to the payload () for the vibration detectable with the vibration sensor.

Active vibration isolation and damping system

An object is mounted on a surface of a sample carrier. Properties of the surface of the object are measured and/or modified by means of a plurality of independently movable heads, each comprising a microscopic probe. The heads being located between the surface of a reference grid plate and the surface of the sample carrier. Head specific target locations are selected for the heads. Each head is moved over the surface of the reference grid plate, to the target location of the head. During movement a position of the head is determined from markings on the reference grid plate sensed by sensor in the head. When the sensor has indicated that the head is at the target location selected for the head a force between the head and the reference grid plate is switched to seat and/or clamp the head on the reference grid plate.

High throughput microscopy device

A scanning probe microscopy device for mapping nanostructures on a sample surface of a sample is provided. The device may comprise a plurality probes for scanning the sample surface, and one or more motion actuators for enabling motion of the probes relative to the sample, wherein each of the plurality of probes comprises a probing tip mounted on a cantilever arranged for bringing the probing tip in contact with the sampling surface for enabling the scanning. The device may further comprise a plurality of Z-position detectors for determining a position of each probing tip along a Z-direction when the probing tip is in contact with the sample surface, wherein the Z-direction is a direction transverse to the sample surface, for enabling mapping of the nanostructures.

Growing community of inventors

Delft, Netherlands

Niek Rijnveld