Stmicroelectronics S.r.l.

Nicolo Frazzetto

Giuseppe D'Arrigo

Ruggero Anzalone

Giuseppe Abbondanza

Marco Antonio Salanitri

Aldo Raciti

Various embodiments provide a reaction chamber including a support, a receptacle, and a sponge. The support includes a plurality of bars that are spaced from each other by a plurality of openings. Each of the bars has side surfaces that are slanted or tilted downward such that melted material may readily flow through the openings. The support is covered with a coating of silicon carbide to prevent materials from adhering to the support. The receptacle underlies the support and is configured to collect any melted material that is drained through the openings of the support. The sponge is positioned in the receptacle and under the support. The sponge is configured to absorb any melted material that is collected by the receptacle.

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San Giovanni la Punta, Italy

Nicolo Frazzetto