Esec, Trading Sa

Nicolino Onda

Peter Hess

Markus Michler

Alexander Greber

Raphael Bernhardsgruetter

Hansjörg Gujer

A clamping element for the transport of a substrate in a predefined transport direction comprises a first and a second leg with a first and second clamping jaw for clamping a substrate. Each of the two clamping jaws has a clamping plate which is movable in transport direction relative to the corresponding leg. A sensor measures the deflection of the first clamping plate relative to the first leg. As soon as the measured deflection exceeds a predefined threshold value, the clamping element is opened.

Clamping element with an integrated force sensor

To determine the vectorial distance D between the tip of a capillary and an optical axis of an image recognition system of a Wire Bonder, a glass fibre supplied with light is used as a reference point and as a sensor. On the one hand, the glass fibre serves as a reference point with which the position of the optical axis of the image recognition system can be determined. On the other hand, the glass fibre serves as a sensor with which the position of the tip of the capillary can be determined in that it is determined at which position of the bondhead the intensity of the light which is reflected back into the glass fibre by a wire ball formed at the tip of the capillary is at a maximum.

Method and device for determining the vectorial distance between the capillary and the image recognition system of a wire bonder

On measurement of a component A of the amplitude of the oscillations of the tip of a capillary which is clamped to a horn to which ultrasonics can be applied from an ultrasonic transducer, whereby measurement is based on the shading of a light beam by the capillary and whereby the intensity of the light beam is measured by means of an opto-receiver, the capillary is placed at one side of the light beam without it shading the light beam and ultrasonics is applied to it. The capillary is then moved in steps through the light beam whereby, for each of the i&equals;1 to n steps, the direct voltage portion U (y ) and the alternating voltage portion U (y ) of the output signal of the opto-receiver are determined as well as a co-ordinate y whereby the co-ordinate y designates the position of the capillary in relation to a co-ordinate axis y running perpendicularly to the light beam. The amplitude A is then calculated from the values measured.

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Bad Ragaz, Switzerland

Nicolino Onda