Robert Boschgmbh

Nicole Schittenhelm

Achim Breitling

Sebastian Guenther

Hartmut Kueppers

Volker Schmitz

Christof Schwenk

Carsten Geckeler

A micromechanical component having a main extension plane is provided; the micromechanical component encloses a first cavern and a second cavern, and a first pressure prevails in the first cavern while a second pressure prevails in the second cavern, and a first layer of the micromechanical component, which extends essentially parallel to the main extension plane, projects into a second layer of the micromechanical component, which extends essentially parallel to the main extension plane, between the first cavern and the second cavern, essentially in a perpendicular direction to the main extension plane.

Micro-mechanical component

A getter device for a micromechanical component, having a metallic getter structure that is situated in a cavity of the micromechanical component. The getter structure is heatable using a defined electric current. It is possible to evaporate the material of the getter structure in a defined manner.

Getter device for a micromechanical component

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Reutlingen, Germany

Nicole Schittenhelm