Thomson-csf

Nicole Proust

Nicolas Szydlo

Jean N Perbet

Francois Boulitrop

Eric Chartier

Bernard Hepp

In a light image detector, a substrate is covered with a first layer of conductive material on which is formed a two-dimensional matrix array of photodiodes in the form of pads arranged in rows and columns and each comprising a layer of amorphous semiconductor material doped with a predetermined type (n-type or p-type), a layer of undoped amorphous semiconductor material, a layer of amorphous semiconductor material doped with another predetermined type (n-type or p-type), a second layer of conductive material, each photodiode being insulated from adjacent photodiodes by means of insulating material. On the insulating material, columns of material are disposed along the columns of photodiodes and are each formed by a layer of metallic material and a layer of doped amorphous semiconductor material. Connection elements are each connected to a photodiode through the layer of conductive material of the photodiode, are located in proximity to a column and each formed by a layer of metallic material and a layer of doped amorphous semiconductor material. Rows of material are disposed along the lines of photodiodes and overlap the columns as well as at least one connection element at each point of intersection of a row and a column. Each row is formed by a layer of undoped amorphous semiconductor material, an insulating layer and a layer of metallic material.

Method of fabrication of a light image detector and a two-dimensional

Diode-type control matrix arrays for electrooptical flat-panel screens which find application in liquid-crystal displays are fabricated by depositing a layer of conductive material on a substrate and etching the control electrodes and control leads in this layer. The entire structure is then coated with an undoped amorphous semiconductor layer, with a doped amorphous semiconductor layer, and with a second layer of conductive material. In these three layers are etched terminal areas (or control elements) for connecting the control electrodes to the control leads.

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Palaiseau, France

Nicole Proust