Average Co-Inventor Count = 8.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Mattson Technology, Inc (2 from 278 patents)
2 patents:
1. 6624082 - Systems and methods for two-sided etch of a semiconductor substrate
2. 6335293 - Systems and methods for two-sided etch of a semiconductor substrate