Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno

Nicole Ellen Papen-Botterhuis

Ruud Cuypers

Adriaan Jan De Jong

Hendrik Pieter Oversloot

Jacobus Eversdijk

Johannes Christiaan Van 't Spijker

Jacques Cor Johan Van Der Donck

Sjoerd Oostrom

Johannes Wilhelmus Otto Salari

Olaf Kievit

Aike Wypke Wijpkema

Nicole Maria Matthias Meulendijks-Kiggen

Johannes Christiaan Van 'T Spijker

The invention describes a composite material for heat storage comprising a thermochemical material (TCM) encapsulated in a water vapour permeable polymeric material. The thermochemical material preferably comprises at least one salt, at least one salt hydrate or a mixture of these, wherein the salt is preferably capable of binding water in an exothermic reaction, such as calcium chloride. Encapsulation in a water vapour permeable polymeric material results in an improved stability, cyclability of the thermochemical material, a reduced regeneration temperature and reduced corrosion of the environment. The composite according to the invention is particularly suitable for energy storage, preferably in the field of building and construction, and more preferably in the seasonal storage of solar energy.

Composite material for heat storage, method for preparation and use

The invention describes a composite material for heat storage comprising a thermochemical material (TCM) encapsulated in a water vapor permeable polymeric material. The thermochemical material preferably comprises at least one salt, at least one salt hydrate or a mixture of these, wherein the salt is preferably capable of binding water in an exothermic reaction, such as calcium chloride. Encapsulation in a water vapor permeable polymeric material results in an improved stability, cyclability of the thermochemical material, a reduced regeneration temperature and reduced corrosion of the environment. The composite according to the invention is particularly suitable for energy storage, preferably in the field of building and construction, and more preferably in the seasonal storage of solar energy.

The invention is directed to a method for removing particulate contaminants from the backside of a wafer or reticle, and to a cleaning substrate for use in such method. In the method of the invention particulate contaminants are removed from the backside of a wafer or reticle with a cleaning substrate. The cleaning substrate comprises protrusions and a tacky layer between the protrusions. The method comprises contacting the backside of the wafer or reticle with the protrusions of the cleaning substrate while maintaining a distance between the wafer or reticle and the tacky layer, the distance being in the range of 1-10 &#x3bc;m.

Removing particulate contaminants from the backside of a wafer or reticle

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's-Gravenhage, Netherlands

Nicole Ellen Papen-Botterhuis