Pfeiffer Vacuum Gmbh

Nicolas Varennes

Pierre-Emmanuel Cavarec

Thibaut Bourrilhon

Cécile Chavanne

Rainer Mathes

Alysson Bruno Barbosa Moreira

A turbomolecular vacuum pump includes a stator, a rotor to rotate inside the stator, and a motor to drive the rotation of the rotor. The turbomolecular vacuum pump further includes a temperature sensor to measure the temperature of the rotor and a creep maintenance meter to determine an incremental change in the creep of the rotor over a predetermined duration from the temperature of the rotor, as measured by the temperature sensor, from the rotational speed of the rotor, from the value of the creep of the rotor, and from the look-up table, to increment the rotor-creep value by the determined creep increment, and to determine, based on the incremented creep value, a data item indicative of the remaining time for which the rotor can run before needing preventive maintenance for creep.

Turbomolecular vacuum pump and associated method

The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange () intended to be coupled to an outlet orifice of a chamber and an outlet coupling () comprising at least two cylindrical outlet through-housings () and forming an at least partial pump casing for the case () of a respective turbomolecular vacuum pump (), said turbomolecular vacuum pumps () being intended to be received in a respective cylindrical outlet housing (). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps () as described hereinabove and at least two turbomolecular vacuum pumps () housed at least partially in a respective cylindrical outlet housing ().

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Brison-Saint-Innocent, France

Nicolas Varennes