Pfeiffer Vacuum Gmbh

Adixen Vacuum Products

Nicolas Chapel

Julien Bounouar

Bertrand Bellet

Cindy Thovex

Olivier Le Barillec

A setting method includes setting the conductances of the controllable restrictions of an airborne molecular contamination measurement station. The setting method includes an initial identification step, prior to the carrying-out of an airborne molecular contamination measurement step, and during which the sampling line that has the lowest conductance when the conductance of the controllable restriction of the said sampling line is set to its maximum value is determined, and an initial conductance-setting step prior to the carrying-out of the measurement step and after the initial identification step, and during which the conductances of the controllable restrictions are set to make them correspond to the lowest conductance determined in the initial identification step. Further, a measurement station is provided for measuring airborne molecular contamination.

Method for setting an airborne molecular contamination measurement station, and measurement station

There is provided a device and method for controlling a tightness of at least one transport enclosure for conveyance and atmospheric storage of semiconductor substrates, the transport enclosure including at least two ventilation ports, the device including at least one interface configured to be coupled to the transport enclosure, the interface including at least two connecting heads, at least one connecting head of the heads being formed by a measurement head configured to engage in a ventilation port of the ventilation ports of the transport enclosure, the measurement head including a projecting end piece, opening through at least one aperture, and a peripheral sealing element surrounding the end piece, all of the ventilation ports of the transport enclosure being coupled to the connecting head of the interface. There is also provided a method for controlling the tightness of the transport enclosure.

Device and method for controlling the tightness of a transport enclosure for the conveyance and atmospheric storage of semiconductor substrates

The present invention relates to a method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure, implemented in a measuring station. The measuring method comprises: The invention also relates to an associated measuring station.

Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure

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Nicolas Chapel