Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Blaser Group Gmbh

Nicolas Benoit

Torsten Feigl

Sergiy Yulin

Norbert Kaiser

Nobert Kaiser

Markus Hahndorff

David Senne

Thermal imaging camera

A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.

Thermally stable multilayer mirror for the EUV spectral range

In a multilayer mirror () for the reflection of EUV radiation containing a large number of alternating molybdenum layers () and silicon layers (), a barrier layer () containing a silicon nitride or a silicon boride is included at a number of interfaces between the molybdenum layers () and the silicon layers (). As a result of the barrier layers () of a silicon nitride or of a silicon boride, high thermal stability is achieved, in particular high long-term stability at temperatures of more than 300&#xb0; C., whilst at the same time achieving high reflectivity in the multilayer mirror. A multilayer mirror () of this type can, in particular, be used as a heatable collector mirror for an EUV radiation source.

Thermally stable multilayer mirror for the EUV spectral region

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Giessen, Germany

Nicolas Benoit