Paratek Microwave Incorporated

Nicolaas DuToit

Louise C Sengupta

Xubai Zhang

Jason Sun

In an embodiment of the present invention is provided a method of manufacturing a varactor, comprising providing a substrate; positioning a bottom electrode on a surface of the substrate; placing a tunable dielectric material adjacent to and extending over the bottom electrode forming a step and in contact with a top electrode; placing an interconnect layer in contact with the bottom electrode, the tunable dielectric and the top electrode.

Varactors and methods of manufacture and use

In an embodiment of the present invention is provided a varactor comprising a substrate, a bottom electrode positioned on a surface of the substrate, a tunable dielectric material positioned adjacent to and extending over the bottom electrode forming a step and in contact with a top electrode, and an interconnect layer in contact with the bottom electrode, the tunable dielectric and the top electrode.

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Columbia, MD, United States of America

Nicolaas DuToit