Asml Netherlands B.v.

Nick Verheul

Remco Dirks

Alexandru Onose

Sander Silvester Adelgondus Marie Jacobs

Frank Jaco Buijnsters

Artur Palha Da Silva Clerigo

Siebe Tjerk De Zwart

Roger Hubertus Elisabeth Clementine Bosch

A method, computer program and associated apparatuses for metrology. The method includes determining a reconstruction recipe describing at least nominal values for use in a reconstruction of a parameterization describing a target. The method includes obtaining first measurement data relating to measurements of a plurality of targets on at least one substrate, the measurement data relating to one or more acquisition settings and performing an optimization by minimizing a cost function which minimizes differences between the first measurement data and simulated measurement data based on a reconstructed parameterization for each of the plurality of targets. A constraint on the cost function is imposed based on a hierarchical prior. Also disclosed is a hybrid model method comprising obtaining a coarse model operable to provide simulated coarse data; and training a data driven model to correct the simulated coarse data so as to determine simulated data for use in reconstruction.

Metrology method and apparatus, computer program and lithographic system

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Den Bosch, Netherlands

Nick Verheul