Mdc Vacuum Products Corporation

Nick Tsujimoto

Wei Gao

Michael E Weiss

Peter H Harris

Jim Moore

An electron beam source provides beam focusing by placing magnets under the crucible. The location of the magnets, operating in conjunction with the remaining magnetic and electromagnetic structure, permits varying sizes of crucibles to be used without redesign of the remainder of the electron beam source.

Electron beam source for use with varying sizes of crucibles

A rotating all metal sealed fluid delivery system for supplying fluid to an apparatus, such as an electron beam source assembly, in an UHV environment includes a housing with fluid inlet and outlet ports therethrough, opposed fluid inlet and outlet lines, an inlet and outlet bellows within the housing, and a turntable mounted in an aperture in the housing for attachment to a rotatable spindle of the apparatus. A ultra high vacuum compression gasket forms an UHV seal between the spindle and the turntable. The bellows are attached at first ends to the inlet and outlet ports, and at opposite ends to the opposed inlet and outlet lines extending to the rotatable apparatus, through the spindle and the turntable into the housing. The bellows are coiled within the housing and separated by a non-abrasive plate. Following attachment to the ports and lines, the entire length of each bellows remains within a single plane during rotation along the same axis as the axis of rotation of the apparatus. As the spindle rotates up to 360.degree., the oppositely wound bellows are moved along the axis of rotation of the spindle where one coils as the other uncoils, all in the same horizontal plane.

UHV rotating fluid delivery system

An electron beam source assembly includes a water cooled crucible positioned substantially flush with the top of the block. A magnet is attached to each long sides of the rectangular block to establish parallel opposed pole magnets with the crucible therebetween. A smaller magnet is attached to each end of each longitudinal magnet to form a second and a third parallel magnet pair. The six magnets produce plano-convex magnetic field lines above the crucible, and additional plano-convex field lines of increased field strength extending outwardly from the end of the block having the four magnets. A magnetic base plate provides a low reluctance path to decrease magnetic flux at the crucible. An electron gun emitter mechanism is sheltered from vapors formed at the crucible and includes architecture to enable electrons to be freely emitted from the filament, without being subjected to the magnetic field lines from the magnet pairs, in a direct path outwardly through an open cavity and through a window formed in the end of the electron source assembly. The freely emitted electron beam assumes a trajectory passing solely through plano-convex magnetic field lines to produce an inverted image at the crucible that is substantially a one-to-one mapping of the filament.

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Moraga, CA, United States of America

Nick Tsujimoto