Mitutoyo Corporation

Nick Hartmann

Norman Laman

A metrology system is provided for use with a movement system that moves an end tool. The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The light beam source configuration directs light beams to light beam sensors to indicate a position and orientation of the light beam source configuration. In a high speed operating mode (e.g., an alternative to a standard speed operating mode), the metrology system determines a region of interest ('ROI') for each light beam sensor of a set of light beam sensors, wherein each ROI includes a measurement spot produced by a light beam. Measurement signals are processed resulting from the ROIs, and a position and orientation of the light beam source configuration is determined. In various implementations, the ROIs are determined (e.g., including position and/or size, etc.) based at least in part on position information from the movement system.

Metrology system with high speed position and orientation tracking mode

A digital holography metrology system is provided including a heterodyne light source, an interferometric optical arrangement and a sensor arrangement. The heterodyne light source provides combined laser beams of different corresponding frequencies and wavelengths (e.g., for which each combined beam may include a corresponding wavelength laser beam and a corresponding frequency shifted laser beam, which may be orthogonally polarized). The interferometric optical arrangement utilizes the combined beams for providing an output for imaging a workpiece, for which the output includes interference beams. The sensor arrangement includes dichroic components which separate the interference beams to be directed to respective time of flight sensors. The outputs from the time of flight sensors are utilized to determine measurements (e.g., the outputs of the time of flight sensors may be utilized to determine a measurement distance to a surface point on a workpiece, etc.).

Digital holography metrology system

A metrology system including a heterodyne light source is provided. The heterodyne light source includes a first light source, an acousto-optic modulator and a source optical arrangement. The acousto-optic modulator receives at least one wavelength laser beam from the first light source and generates at least one corresponding frequency shifted laser beam (e.g., with orthogonal polarization). The source optical arrangement includes a receiving optical element portion and a birefringent optical element portion. The receiving optical element portion receives the wavelength laser beam(s) and the corresponding frequency shifted laser beam(s) and directs the beams along an optical path toward the birefringent optical element portion. The birefringent optical element portion combines the beams to output a combined beam (e.g., which may be utilized as part of a measurement process to determine at least one measurement distance to at least one surface point on a workpiece, etc.).

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Newcastle, WA, United States of America

Nick Hartmann