Applied Materials, Inc.

Nicholas Ward

James Robert Moyne

Richard Stafford

David Bellamy Corey

Richard Danielson

A yield prediction is received by a strategy engine. The strategy engine compares the end-of-line yield prediction to a plurality of rules. The strategy engine then instructs a component of an equipment engineering system to perform an action included in a rule that corresponds to the end-of-line yield prediction.

Yield prediction feedback for controlling an equipment engineering system

A yield prediction is received by a run-to-run controller that includes an intra-process run-to-run control module that specifies process performance targets, wherein the yield prediction is associated with at least one of a manufacturing tool, a product or a process. The run-to-run control module adjusts first parameters associated with intra-process run-to-run control based on the yield prediction, wherein the first parameters include processing parameters of a process recipe.

A yield prediction is received by a scheduling and dispatch controller, wherein the yield prediction is associated with a manufacturing tool and a product. A weighting of the manufacturing tool is adjusted in a routing algorithm based on the yield prediction. A cost-benefit analysis is computed that identifies a cost and a benefit of manufacturing future products on the manufacturing tool. A determination is made regarding whether to process a future product on the manufacturing tool based on the cost-benefit analysis.

A semiconductor fabrication system, method and medium are disclosed. The system includes a semiconductor fabrication tool and a software application, in communication with the semiconductor fabrication tool. The semiconductor fabrication tool includes a chamber configured to perform at least one process on a semiconductor wafer. The software application is configured to determine specified qualities of the first chamber in performing the at least one process. The specified qualities are directed to at least one of: a processing time required to perform the at least one process, a rate of producing defective output products of the at least one process, a uniformity of output products of the at least one process, and a capability index of the at least one process.

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Nicholas Ward