Surface Technology Systems Plc

Nicholas Shepherd

Jyoti Kiron Bhardwaj

Leslie Michael Lea

Graham Hodgson

A ClFgas generation system is provided with supply sources of chlorine () (for example a cylinder of compressed chlorine) and fluorine () (for example a fluorine generator) connected into a gas reaction chamber () enabling generation of ClFgas. The reaction chamber has a valved outlet (C) for the supply of the ClFgas to a process chamber for immediate local use.

Chlorotrifuorine gas generator system

A substrate is treated by supplying an etchant and/or deposition gas into a chamber in which the substrate is situated. In order to avoid the problems associated with transportation of toxic gases, the gases required for such processes are delivered directly from a gas generation and delivery system positioned locally to the chamber.

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Cardiff, United Kingdom

Nicholas Shepherd