Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Infineon Technologies Richmond, LP (1 from 48 patents)
1 patent:
1. 7184853 - Lithography method and system with correction of overlay offset errors caused by wafer processing