Mks Instruments, Inc.

Nicholas Kottenstette

Ali Shajii

Jesse E Ambrosina

Donald K Smith

Siddharth P Nagarkatti

John A Smith

William R Clark

Jeffrey Vincent Anastas

Louis R Slamka

Jesse Ambrosnia

R Leonard Myatt

A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

Apparatus and method for pressure fluctuation insensitive mass flow control

A mass flow controller includes a pressure sensor that senses pressure within the mass flow controller and displays the pressure. The pressure display may be local, mounted directly to the mass flow controller, or it may be connected through a link to the mass flow controller for remote display.

Apparatus and method for displaying mass flow controller pressure

A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.

Apparatus and method for calibration of mass flow controller

A flow monitoring system includes a first temperature-sensitive resistive device, thermally coupled to a first portion of a fluid transfer apparatus, for producing a first temperature-dependant voltage signal representative of the temperature of the fluid within the first portion of the fluid transfer apparatus. A first current control device, coupled to the first temperature-sensitive resistive device, controls a first current signal flowing through the first temperature-sensitive resistive device. A second temperature-sensitive resistive device, thermally coupled to a second portion of the fluid transfer apparatus, produces a second temperature-dependant voltage signal representative of the temperature of the fluid within the second portion of the fluid transfer apparatus. A second current control device, coupled to the second temperature-sensitive resistive device, controls a second current signal flowing through the second temperature-sensitive resistive device. A monitoring circuit monitors the first and second temperature-dependant voltage signals and produces an output signal representative of the volume of fluid passing through the fluid transfer apparatus.

Flow monitoring system

A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a desired ratio of flow through a user interface, receive signals indicative of measured flow from the flow meters, calculate an actual ratio of flow through the flow lines based upon the measured flows, and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flow through at least one of the flow lines if the actual ratio is unequal to the desired ratio, and provide a signal indicative of the desired flow to at least one of the valves.

Mass flow ratio system and method

A mass flow controller includes an electronic controller that provides a web server that allows access to the web server through such interworking networks as the Internet.

Apparatus and method for mass flow controller with embedded web server

A mass flow controller includes a mass flow sensor and a calibrator configured to perform a self-calibration on the mass flow controller. The calibrator generates flow measurements that are used as 'standards' and flow measurements from the mass flow sensor are correlated to flow measurements from the calibrator.

Apparatus and method for self-calibration of mass flow controller

A mass flow controller includes an electronic controller for which a plurality of closed loop control codes sets may be uploaded. In a dual processor embodiment, one processor may upload a plurality of codes sets for another, with the selection of codes sets determined by the uploading processor either autonomously or through user interaction.

Apparatus and method for mass flow controller with a plurality of closed loop control code sets

A mass flow measurement apparatus including a flow path defined by a tubular side wall, a probe extending through the side wall into the flow path so that a first portion of the probe is located in the flow path and a second portion of the probe, extends out of the side wall, a heater element secured to the probe, and a seal preventing fluid flowing through the flow path from contacting the heater element.

Thermal anemometry mass flow measurement apparatus and method

A mass flow controller includes a network interface port and interface software that provide direct access to the mass flow controller. The mass flow controller also includes diagnostic software that permits a technician to execute diagnostics through the network interface port.

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Newburyport, MA, United States of America

Nicholas Kottenstette