Motorola Corporation

Nicholas J Naclerio

Rong-Fong Huang

Jeremy W Burdon

David Wilcox

Huinan J Yu

Barbara M Foley

Piotr Grodzinski

Xunhu Dai

Sean Gallagher

Robert Marrero

Yuk-Tong Chan

Cynthia Ann Gorsuch Briscoe

A method for fabricating a multilayered structure out of sheets of green-tape without the application of high pressures includes the step of applying an adhesive to the sheets of green-tape. Selection of an adhesive with a polymer that decomposes at a higher temperature than the binder present in the green-tape promotes stability of the interfaces during the firing process and promotes void-free sintering within the interfacial regions. A multilayered structure with internal electrical conduction pathways and with internal vias, channels, and cavities may be fabricated by this method

Method for fabricating a multilayered structure and the structures formed by the method

A multilayered microfluidic device having a substantially monolithic structure is formed by sintering together a plurality of green-sheet layers. The substantially monolithic structure has an inlet port for receiving fluid, an outlet port for releasing fluid, and an interconnection between the inlet port and the outlet port. The substantially monolithic structure may also include a variety of components to enable useful interaction with the fluid, such as electrically conductive pathways, heaters, fluid sensors, fluid motion transducers, and optically transmissive portions. The components are preferably fabricated using thick-film or green-sheet technology and are preferably co-fired with and sintered to the green-sheet layers to become integral with the substantially monolithic structure.

Integrated multilayered microfludic devices and methods for making the same

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Barrington, IL, United States of America

Nicholas J Naclerio