Pulsetor, LLC

Nicholas C Barbi

Richard B Mott

Filip Lopour

Claudio Piemonte

Felip Lopour

Claudio Piedmonte

An X-ray detector includes a housing and an X-ray sensing device provided within the housing along the axis of the housing, wherein the housing is structured to be coupled to the electron column or sample chamber of a charged particle beam device. The X-ray detector also includes an electron detector structured to detect a plurality of electrons ejected from a sample in response to an electron beam impinging on the sample, the electron detector being coupled to the housing on or near the axis such that a first line of sight to the electron detector from a point at which the electron beam impinges on the sample is similar to a second line of sight to the X-ray sensing device from the point at which the electron beam impinges on the sample such that X-ray and Backscattered electron images will show similar parallax and shadowing effects.

X-ray detector including integrated electron detector

A charged particle beam device includes an electron source structured to generate an electron beam, the electron source being coupled to an electron column that at least partially houses a system structured to direct the electron beam toward a specimen positioned in a sample chamber to which the electron column is coupled, and an electron detector. The electron detector includes one or more assemblies positioned within the electron column or the sample chamber, each of the assemblies including an SiPM and a scintillator directly connected face-to-face to an active light sensing surface of the SiPM without a light transporting device being positioned in between the scintillator and the SiPM.

Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same

An electron detector includes a plurality of assemblies, the plurality of assemblies including a first assembly having a first SiPM and a first scintillator made of a first scintillator material directly connected to an active light sensing surface of the first SiPM, and a second assembly having a second SiPM and a second scintillator made of a second scintillator material directly connected to an active light sensing surface of the second SiPM, wherein the first scintillator material and the second scintillator material are different than one another. Alternatively, an electron detector includes an assembly including an SiPM and a scintillator member having a front surface and a back surface, the scintillator member being a film of a scintillator material directly deposited on to an active light sensing surface of the SiPM.

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Yardley, PA, United States of America

Nicholas C Barbi