Robert Boschgmbh

Nicholas Buchan

Markus Lutz

Michael Offenberg

Franz Laermer

Horst Muenzel

Klaus Heyers

Eckhard Graf

Dietrich Schubert

Bernhard Elsner

Udo Bischof

Michael Fehrenbach

Heinz-Georg Vossenberg

Horst Munzel

Helmut Skapa

A method for producing a micromechanical component (e.g., a capacitive acceleration sensor) having one or several electrical or mechanical function variables dependent on at least one geometric design parameter. The micromechanical component is produced by an etching process via which a structure with bars and trenches is formed. The structure is formed by drafting a design for the micromechanical component in such a way that the geometric design parameter within the local area of the micromechanical component is subject to a predetermined process-related regularity. The design parameter is essentially constant in relation to function blocks in particular, so that in the etching process, the process tolerance of the design parameter within the micromechanical component essentially shows no locus dependency.

Micromechanical component and method for producing the micromechanical component

A rate-of-rotation sensor includes a three-layer system. The rate-of-rotation sensor and the conductor traces are patterned out of the third layer. The conductor traces are electrically insulated (isolated) by cutouts from other regions of the third layer and by a second electrically insulating layer from a first layer. Thus, a simple electrical contacting (configuration) is achieved that is patterned out of a three-layer system. Since the same etching process is used for the first and the third layer, an especially efficient manufacturing is possible.

Method for manufacturing a rate-of-rotation sensor

Method of producing acceleration sensors

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Reutlingen, Germany

Nicholas Buchan