International Business Machines Corporation

Nicholas Anthony Lanzillo

Lawrence Alfred Clevenger

Christopher J Penny

Brent A Anderson

Robert Russell Robison

Kisik Choi

Michael Rizzolo

Benjamin David Briggs

Ruilong Xie

Theodorus E Standaert

Hosadurga K Shobha

Koichi Motoyama

Huai Huang

Chih-Chao Yang

Albert Manhee Chu

James H Stathis

Takeshi Nogami

Reinaldo Ariel Vega

Somnath Ghosh

Prasad Bhosale

Chanro Park

Junli Wang

Christian Lavoie

Hsueh-Chung Chen

Seiji Munetoh

Geoffrey W Burr

Kohji Hosokawa

Timothy Mathew Philip

Kenneth Chun Kuen Cheng

Ching-Tzu Chen

Biswanath Senapati

Takashi Ando

Chen Zhang

Rajiv V Joshi

Nicolas J Loubet

Guy M Cohen

Oleg Gluschenkov

Vijay Narayanan

Balasubramanian Pranatharthiharan

Son Van Nguyen

Alfred Grill

Baozhen Li

Rudy J Wojtecki

Teodor Krassimirov Todorov

Oki Gunawan

Cornelius Brown Peethala

Nathan P Marchack

Kevin W Brew

James John Kelly

David S Wolpert

Youngseok Kim

Daniel James Dechene

Sagarika Mukesh

Adra Carr

Eric Miller

Devika Sil

Zlatko Kristev Minev

Priti Ashvin Shah

Thomas George McConkey

Marco Facchini

Utkarsh Bajpai

Peter Kerns

A semiconductor structure and method of manufacturing a semiconductor structure having a front side and an opposing backside. An early power delivery network (EBPDN) of wires is built above a substrate layer. Buried power rails (BPRs) are built above levels of the PDN and connected to the EBPDN by short length via connections that can be self-aligned to the back side buried power rails. Both BPRs and vias connections have a common metallization. A front side level of transistor devices are built at the front side of the structure above the BPRs. The resulting formed buried power rail structure has an aspect ratio of height:width greater than 4:1, a height >3 times a height of the formed via structure; and a via structure having a length greater than a height of the formed conductive power rail structure.

Early backside first power delivery network

Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a semiconductor wafer having a first transistor and a second transistor; a first source/drain (S/D) contact of the first transistor; a second S/D contact of the second transistor; and a cut region between the first S/D contact and the second S/D contact, wherein the cut region includes a liner of a first dielectric material and a filler of a second dielectric material that is different from the first dielectric material, the liner lining at least a part of the first S/D contact and a part of the second S/D contact, and the filler being directly adjacent to the liner and between the first S/D contact and the second S/D contact. A method of manufacturing the semiconductor structure is also provided.

Source/drain contact at tight cell boundary

Semiconductor devices including a super via connection between levels are provided. The semiconductor device can include a first interlevel dielectric layer, a back-end-of-line (BEOL) interconnect structure disposed in the first interlevel dielectric layer, a second interlevel dielectric layer disposed on a first portion of the first interlevel dielectric layer, a third interlevel dielectric layer disposed on the second interlevel dielectric layer, and a super via disposed on a second portion of the first interlevel dielectric layer, wherein a first end of the super via is connected to the BEOL interconnect structures and wherein a second end of the super via opposite the first end of the super via is a distance from the first interlevel dielectric layer larger than a height distance of the second interlevel dielectric layer.

BEOL interconnect subtractive etch super via

A first power rail directly below and connected to a source-drain epitaxy region of a positive field effect transistor (p-FET) region, a second power rail directly below and connected to a source-drain epitaxy region of a negative field effect transistor (n-FET) region, the first power rail and the second power rail each comprise vertical side surfaces which taper in an opposite direction from each other. Forming a first power rail by subtractive metal etch, where the first power rail is directly below and connected to a source-drain epitaxy region of a p-FET region and forming a second power rail by damascene process, where the second power rail is directly below and connected to a source-drain epitaxy region of an n-FET region, the first power rail and the second power rail each comprise vertical side surfaces which taper in an opposite direction from each other.

Backside power rail with tight space

A microelectronic structure comprises a first interconnect line at a first interconnect level, a second interconnect line at a second interconnect level, and at least one via connecting the first interconnect line at the first interconnect level to the second interconnect line at the second interconnect level. The at least one via comprises a vertical section and at least one horizontal section, the at least one horizontal section being in contact with at least a portion of one of a top surface of the first interconnect line and a bottom surface of the second interconnect line.

Interconnect structures with vias having vertical and horizontal sections

A semiconductor structure includes a first metallization layer having a first plurality of metal containing lines, and a second metallization layer located above the first metallization layer. The second metallization layer includes a second plurality of metal containing lines. A first group of the second plurality of metal containing lines is disposed within the first metallization layer. The first group of the second plurality of metal containing lines is isolated from the first metallization layer by a dielectric barrier layer.

Semiconductor structure with backside metallization layers

A structure is provided that includes a first metal level including a first metal line, a second metal level spaced apart from the first metal level and including a second metal line, and a first metal via structure connecting the first metal line to the second metal line. The first metal via structure directly contacts a sidewall surface and a horizontal surface of the first metal line.

Wrap around metal via structure

A vertical transport field effect transistor (VTFET) apparatus includes a fin-shaped channel structure; a gate stack that surrounds the channel structure; a top source/drain structure at a top end of the channel structure; a top interconnect layer above the top source/drain structure; a top contact that electrically connects the top source/drain structure to the top interconnect layer; a bottom source/drain structure at a bottom end of the channel structure; a backside interconnect layer below the bottom source/drain structure; and a backside contact that touches a bottom surface of the bottom source/drain structure and also touches a side surface of the bottom source/drain structure and electrically connects the bottom source/drain structure to the backside interconnect layer.

Vertical transport field effect transistor (VTFET) with backside wraparound contact

An interconnect structure including conducting layers of topological semi-metals and/or topological insulators. To increase charge carrier density in the conducting layers, a charge carrier doping layer present on at least one surface of the one or more conductive layers of topological semi-metals. The charge carrying doping layers have a charge carrier density greater than the topological semi-metals and/or topological insulators of the one or more conductive layers.

Multi-layer topological interconnect with proximal doping layer

A semiconductor component includes a dielectric layer including an opening. The semiconductor component further includes a liner arranged in the opening in direct contact with the dielectric layer. The semiconductor component further includes a wetting layer arranged in the opening in direct contact with the liner. The semiconductor component further includes an interconnect structure arranged in the opening in direct contact with the wetting layer. The semiconductor component further includes a cap arranged in the opening in direct contact with the interconnect structure and separated from the wetting layer by a spacer.

Damascene interconnect spacer to facilitate gap fill

A back side contact structure is provided that directly connects a first electrode of a MRAM, which is present in a back side of a wafer, to a source/drain structure of a transistor. The back side contact is self-aligned to the source/drain structure of the transistor as well as to the first electrode of the MRAM. The close proximity between the MRAM and the source/drain structure increases the speed of the device. MRAM yield is not compromised since no re-sputtering of back side contact metal onto the MRAM occurs.

MRAM integration with self-aligned direct back side contact

An IC memory device includes a substrate and an array of memory cells on the substrate. Each memory cell includes at least one memory cell transistor in a layer of the device adjacent to the substrate. In the same layer, the device also includes a plurality of shunt transistors. The device also includes a buried metal signal rail, which is disposed between the array of memory cells and the plurality of shunt transistors in a buried layer that is embedded into the substrate below the transistors. The device also includes single-layer vias, which are in same layer as the transistors and electrically connect the memory cell transistors to the shunt transistors through the buried metal signal rail.

Buried metal signal rail for memory arrays

A dual structure buried rail includes an upper rail and a lower rail. The upper rail may be inset relative to the lower rail. In other words, the lower rail may be wider than the upper rail, and/or the lower rail may have a larger geometrical volume than the upper rail. The upper rail may be located at a boundary of, and/or directly next to, an active device region and the lower rail may extend directly underneath at least a portion of the active device region. The lower rail may extend the entire length of the upper rail. The dual structure buried rail may reduce buried rail resistance which may reduce voltage drop thereacross and provide for improved semiconductor device and/or active device region performance. The dual structure buried rail may provide power potential delivery, provide potential sinking, or the like, to one or more active device region(s).

Dual structured buried rail

A skip-level through-silicon via structure is provided that enables low resistance via connection for backside power distribution by skipping one or more intermediate backside metal layers. The skip-level through-silicon via structure can enable a greater design flexibility for power grid. The skip-level through-silicon via structure has a large size that provides lower through-silicon via resistance as compared with conventional through-silicon via structures.

Skip-level TSV with hybrid dielectric scheme for backside power delivery

Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a semiconductor chip having a frontside and a backside; a first metal level at the backside of the semiconductor chip; a second metal level above the first metal level; a plurality of damascene vias extending from the second metal level towards the first metal level; and a plurality of subtractive vias extending from the first metal level towards the second metal level, wherein the plurality of damascene vias and the plurality of subtractive vias are staggered to form an interdigitated comb-comb structure. A method of forming the semiconductor structure is also provided.

Decoupling capacitance in backside interconnect

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Troy, NY, United States of America

Nicholas Anthony Lanzillo