Asml Netherlands B.v.

Nianpei Deng

Wei Fang

Yu Liu

Zhonghua Dong

Lingling Pu

Ying Luo

Bohang Zhu

Long Di

Ruochong Fei

Xuehui Yin

Systems and methods for irradiating a sample with a charged-particle beam are disclosed. The charged-particle beam system may comprise a stage configured to hold a sample and is movable in at least one of X-Y-Z axes. The charged-particle beam system may further comprise a position sensing system to determine a lateral and vertical displacement of the stage, and a beam deflection controller configured to apply a first signal to deflect a primary charged-particle beam incident on the sample to at least partly compensate for the lateral displacement, and to apply a second signal to adjust a focus of the deflected charged-particle beam incident on the sample to at least partly compensate for the vertical displacement of the stage. The first and second signals may comprise an electrical signal having a high bandwidth in a range of 10 kHz to 50 kHz, and 50 kHz to 200 kHz, respectively.

Systems and methods for focusing charged—particle beams

Growing community of inventors

Fremont, CA, United States of America

Nianpei Deng