Asml US, Inc.

Nhan Nguyen

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A fluid delivery apparatus for transporting a fluid to one or more fluid handling components. The fluid delivery apparatus includes one or more modular subassemblies having an upper module, a lower module, and a base block. The upper module includes a passageway for coupling with a fluid handling component such that the upper passageway is in fluid communication with the fluid handling component. The lower module includes a lower passageway for coupling with the upper module such that the passageways are in fluid communication. The lower module includes a flow channel having a lower passageway. The base block includes a receptacle and a channel. The upper module is received within the receptacle and the lower module extends through the channel. The modular subassembly can include a spacer having a plurality of alignment apertures for aligning fluid coupling ports of the upper and lower modules. A method of using the fluid delivery apparatus is also disclosed.

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Santa Ana, CA, United States of America

Nhan Nguyen