Nikon Research Corporation of America

Nikon Corporation

Seagate Technology Incorporated

Western Digital Technologies, Inc.

Neyram Hemati

Michael B Binnard

Chunjer Chuck Cheng

Donald J MacLeod

Charles D Flanigan

Jerry Joseph Weingord

Yao-Hsin Huang

Peyman K Nejad

A method for moving a stage includes coupling a stage mover to the stage, and directing current to the stage mover with a control system. The stage mover includes a magnet array and a conductor array positioned adjacent to the magnet array. The conductor array includes a first layer of coils and a second layer of coils, with the first layer of coils being closer to the magnet array than the second layer of coils. The control system directs current to the first layer of coils and the second layer of coils independently. Further, the control system directs more current to the first layer of coils than the second layer of coils during a movement step to reduce the power consumption.

Power minimizing controller for a stage assembly

A linear motor for use in semiconductor processing apparatuses. The linear motor is a three axis linear motor that includes magnets that cover end turns of coil windings in order to utilize the end turns to generate a force along a second or third axis. The coil windings are positioned between two magnet arrays and each magnet array has a magnet, such as a voice coil motor (VCM) magnet, positioned along one side to cover the endturns and provide a magnetic flux. A VCM back iron is positioned to provide a magnetic flux return path for the VCM magnets. The structure in conjunction with a DC offset produces a useful force.

Three axis linear actuator

Current amplitudes in a motor can be controlled by summing a first signal indicative of an output current of the motor with a current command signal, integrating the current command signal with respect to time, and applying a first controller gain to a second signal indicative of the output current of the motor to obtain a gain-controlled signal indicative of the output current of the motor. The method further includes applying a second controller gain to the current command signal to obtain a gain-controlled current command signal, summing the gain-controlled signal indicative of the output current of the motor with the gain-controlled current command signal to obtain a voltage signal, and inputting the voltage signal to the motor such that current amplitudes in the motor are controlled.

Current controller for cryogenically cooled motor

A disk drive includes a base, and a spindle motor coupled to the base. The spindle motor includes a hub defining an axis of rotation. The disk drive further includes a disk disposed about the hub and including a disk inner diameter biased against the hub at a contact location of the hub. The disk drive further includes a balancing element including a cylindrical portion disposed about the hub. The balancing element further includes a first cavity defining a first cavity centroid disposed on a same side of the axis of rotation as the contact location, and a second cavity defining a second cavity centroid disposed on a side of the axis of rotation opposite the first cavity centroid. The second cavity centroid is spaced apart from the first cavity centroid in a direction along the axis of rotation.

Disk drive including a balancing element with first and second cavities and a cylindrical portion disposed about a spindle motor hub

A disc drive spindle motor which has an increased resistance to operating and non-operating shock and vibration is provided, which improves the resistance to non-operating shock, is easy to manufacture and assemble, and which remains low in weight, low in height, and has low power consumption.

Growing community of inventors

Saratoga, CA, United States of America

Neyram Hemati