United Microelectronics Corp.

Neng-Hsing Shen

Ji-Fu Kung

Ching-Pei Lin

Chun-Man Li

Chien-Wen Yang

An apparatus for controlling an operation of a machine includes an optical recognition system, a control unit, and a remote control interface. The optical recognition system is configured to monitor and obtain actual operation information displayed on a panel of a processing machine in accordance with an operation time. The control unit is configured to receive the actual operation information and check the actual operation information with expected operation information. The expected operation information is obtained based on an operation model which is already built up corresponding to a current fabrication process. Deviation information between the actual operation information and the expected operation information is determined and converted into a parameter set. The remote control interface receives the parameter set and converts the parameter set into a control signal set to control the operation of the processing machine.

Growing community of inventors

Hsinchu County, Taiwan

Neng-Hsing Shen