Versum Materials Us, LLC

S & P Ingredient Development, LLC

Neil Osterwalder

Sergei Vladimirovich Ivanov

Xinjian Lei

Manchao Xiao

Raymond Nicholas Vrtis

Madhukar Bhaskara Rao

Robert Gordon Ridgeway

Steven Gerard Mayorga

Meiliang Wang

Sambasiva Rao Chigurupati

Xiaoxi Wu

Pratik Bhandari

Pratik Nandan Bhandari

Steve Gerard Mayorga

Condensable metal halide materials, such as but not limited to tungsten hexachloride and tungsten pentachloride can be used deposit films metal or metal containing films in a chemical vapor deposition (CVD) or atomic layer deposition process. Described herein are high purity tungsten hexachloride and tungsten pentachloride systems and methods to purify tungsten hexachloride and tungsten pentachloride raw materials. There is provided a purified tungsten hexachloride and tungsten pentachloride containing less than 10 ppm, preferably less than 5 ppm, more preferably less than 1 ppm, and most preferably less than 0.5 ppm of iron and/or molybdenum; and less than 10 ppm, preferably less than 5 ppm of all other trace metals combined including but not limited to aluminum, potassium and sodium.

Ultra-high purity tungsten chlorides

Lanthanide compounds for vapor deposition having &#x2264;50.0 ppm, &#x2264;30.0 ppm, or &#x2264;10.0 ppm of all halide impurity combined is provided. The purification systems and methods are also provided.

Low halide lanthanum precursors for vapor deposition

A method for producing an alkenyl or alkynyl-containing organosilicon precursor composition, the method comprising the steps of distilling at least once a composition comprising an alkenyl or alkynyl-containing organosilicon compound having the formula RSiRwherein R is selected a linear or branched Cto Calkenyl group, a linear or branched Cto Calkynyl group; Ris selected from hydrogen, a linear or branched Cto Calkyl group, and a Cto Ccyclic alkyl group; and n is a number selected from 1 to 4, wherein a distilled alkenyl or alkynyl-containing organosilicon precursor composition is produced after distilling; and packaging the distilled alkenyl or alkynyl-containing organosilicon precursor composition in a container, wherein the container permits transmission into the container of no more than 10% of ultraviolet and visible light having a wavelength of between 290 nm to 450 nm.

Stable alkenyl or alkynyl-containing organosilicon precursor compositions

The present invention is directed to salt compositions and methods used to make them. Embodiments may include methods for preparing salt compositions that include aerosolizing a melted salt composition to form droplets, where the droplets form rounded particles. Embodiments may further include solid compositions, including rounded salt particles, where the particles are formed by aerosolizing a melted salt composition. The particles can have semisolid interiors with void spaces.

Compositions of low sodium salt and methods of making and using

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Carlsbad, CA, United States of America

Neil Osterwalder