Neil James Leonard Bennett

Thomas Partington

Michael Carrington Sellars

Jonathan Bouis

A surface profile measuring instrument (), and method, for measuring the surface profile of a substrate (). The surface profile measuring instrument () comprises an electromagnetic probe (), the electromagnetic probe () comprising a probe tip operable to be brought into proximity with a surface of a substrate () to be measured, a drive unit () operable to generate a low frequency magnetic field penetrating the surface of the substrate (), a pick up unit () operable to detect the strength of the magnetic field and output a magnetic field strength reading and a computation unit () operable to determine a surface profile measurement based on the magnetic field strength reading.

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Cheshire, United Kingdom

Neil James Leonard Bennett