Onto Innovation Inc.

Neil Casa

Jason Paul Remillard

Stephen W Into

Various examples include a substrate pre-aligner system that can align substrates by detecting a fiducial on the substrate, determine an amount of bow in the substrate, and determine other characteristics of the substrate. In one example, by imaging both a 0-degree orientation and after a single 180-degree rotation of the substrate, the pre-aligner of the disclosed subject-matter can determine, for example, a location of the fiducial and bow in the substrate. In other embodiments, multiple cameras are used to capture images of the substrate substantially simultaneously and determine, for example, a location of the fiducial and bow in the substrate. The multiple camera embodiment can also allow a higher throughput of substrates as compared with the 0-degree to 180-degree embodiment. Other systems and methods are also disclosed.

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Wilmington, MA, United States of America

Neil Casa