Applied Materials, Inc.

Naveen Kumar Nagaraja

Vijay D Parkhe

Sanjeev Baluja

Tejas Ulavi

Dhritiman Subha Kashyap

Ashutosh Agarwal

Surajit Kumar

Substrate supports comprising a plurality of bonded plates forming a single component support body and methods of forming the substrate supports are described. The single component support body has an outer peripheral edge, a top surface and a bottom surface. A pocket is formed in the top surface and has a bottom surface, a depth and an outer peripheral edge. A purge ring is spaced a distance from the outer peripheral edge and comprises at least one opening in the top surface in fluid communication with a purge gas line within the body thickness.

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Karnataka, India

Naveen Kumar Nagaraja