Gigaphoton Inc.

Komatsu Corporation

Other

Natsushi Suzuki

Hiroaki Tsushima

Osamu Wakabayashi

Masanori Yashiro

Junichi Fujimoto

Shunsuke Yoshioka

Hisashi Nara

Hiroyuki Shinozaki

Kouji Kakizaki

Hakaru Mizoguchi

Toshiharu Nakazawa

Shinichi Sekiguchi

Toshimitsu Barada

Hisakazu Katsuumi

Atsushi Ooyama

Hiroaki Nakarai

A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.

Gas laser apparatus

A gas purification system may include: a circulation gas pipe in which a second end is connected at a first position to a second pipe through which gas is supplied from a gas supply source; a booster pump; a gas purification unit; a first tank in the circulation gas pipe; a first valve positioned between the gas supply source and the first position, the first valve having an open position and a closed position; and a second valve positioned between the first tank and the second end, the second valve having an open position and a closed position, the second valve configured to be in the closed position when the first valve is in the open position.

A laser gas purifying system to purify laser gas emitted from a laser apparatus and return purified gas to the laser apparatus may include a first pipe configured to pass the laser gas emitted from the laser apparatus, a purifying apparatus connected to the first pipe and configured to purify the laser gas emitted from the laser apparatus, a second pipe connected to the purifying apparatus and configured to return the purified gas purified by the purifying apparatus to the laser apparatus, and an exhausting device provided in at least one of the first pipe, the purifying apparatus, and the second pipe.

Laser gas purifying system and laser system

A gas supply system may include a first gas supply line, a second gas supply line, a circulation gas pipe, a gas purification unit, a first valve, and a second valve. The first gas supply line may include a first branching point at which the first gas supply line branches into a first branch connected to a first chamber and a second branch connected to a second chamber and the second gas supply line may include a second branching point at which the second gas supply line branches into a third branch connected to the first chamber and a fourth branch connected to the second chamber. A first portion of the first gas supply line upstream from the first branching point and a second portion of the second gas supply line upstream from the second branching point may be constituted by separate pipes from each other.

A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas and connected through a second control valve to a second laser gas supply source that supplies a second laser gas having a lower halogen gas concentration than the first laser gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump, connected through a third control valve to the laser chamber, which raises a pressure of a gas having passed through the purification column to a gas pressure that is higher than an operating gas pressure of the laser chamber; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump through the third control valve to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.

A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization includes a dielectric pipe; a preliminary ionization inner electrode provided inside the dielectric pipe; and a preliminary ionization outer electrode provided outside the dielectric pipe. The preliminary ionization outer electrode includes: a contact plate part configured to contact the dielectric pipe; and an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.

Preliminary ionization discharge device and laser apparatus

There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.

Laser chamber and discharge excitation gas laser apparatus

An excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has low power consumption. Each electromagnet (stator) ( - ) of a magnetic bearing ( ) for supporting a rotary shaft ( ) of a circulation fan includes excitation coils. Each of the coils is arranged as one unit by embedding a coil body in a ceramic or glass type hardened material which is non-magnetic and has corrosion resistance against a laser gas. The excitation coils are attached to magnetic poles. Alternatively, coil wires ( ) of a radial magnetic bearing ( ) can be isolated from a corrosive atmosphere by means of a separation wall ( ) while projecting portions of cores ( ) extend through the separation wall ( ) and are exposed toward a magnetic bearing rotor ( ).

Excimer laser apparatus

The invention provides a discharge electrodes structure which can be easily replaced and adjustable a distance between the discharge electrodes, and a laser apparatus employing the discharge electrodes. Accordingly, the laser apparatus is provided with a pair of anode ( A) and cathode ( B) provided within a laser chamber ( ) for sealing a laser medium in an opposing manner, generating a discharge so as to excite the laser medium and oscillating a laser beam, a conductive anode base ( ) holding the anode, an insulative cathode base ( ) placed so as to close an opening portion ( ) provided in the laser chamber and holding the cathode, a return plate ( ) suspending the anode base from the cathode base so as to supply a current to the anode, and an anode support bar ( ) for connecting the cathode base to the anode base so as to suspend the anode from the cathode base.

Discharge electrodes structure for laser apparatus and laser apparatus therewith

The invention provides a method of adjusting a rotational balance of a once through fan for a gas laser apparatus. In a gas laser apparatus having a laser chamber for charging a laser gas and a once through fan for circulating and driving the laser gas, a mounting hole for mounting a balance weight for adjusting a rotational balance of the once through fan is provided on a peripheral edge surface of a blade supporting plate for supporting a blade portion of the once through fan.

Growing community of inventors

Oyama, Japan

Natsushi Suzuki