Canon Kabushiki Kaisha

Natsuhiko Mizutani

Yasuhisa Inao

Tomohiro Yamada

Ryo Kuroda

Toshiki Ito

Takako Yamaguchi

Tetsuo Kobayashi

Takahiro Numai

Seiichi Miyazawa

Kentaro Furusawa

Sunao Ichihara

Jun Nitta

Shuji Taue

Toshihiko Ouchi

Yukio Furukawa

Hajime Sakata

Kazuhide Miyata

Hideyuki Sugioka

Mitsuru Ohtsuka

Yosuke Ito

Akira Terao

Kiyoshi Ishikawa

Provided is an optically pumped atomic magnetometer that can separate and acquire magnetic information of spatially different places at the same time by one probe beam. The optically pumped atomic magnetometer includes a cell containing alkali metal atoms, a pump beam optical system introducing pump beams including circularly polarized light component to different locations of the cell, a probe beam optical system introducing a probe beam including linearly polarized light component to the cell, a detection unit detecting a signal reflecting a rotation angle of a plane of polarization of the probe beam after intersecting with the pump beams, and an information acquisition unit acquiring information related to a magnetic field intensity of each of the different locations from the detected signal. The pump beam optical system includes a modulation unit modulating the pump beams so that one of frequencies and phases of the pump beams is different.

Optically pumped atomic magnetometer and magnetic sensing method

There is provided an optically pumped magnetometer, in which a pump light having a first wavelength to spin-polarize a first alkali-metal atom group is made to enter a cell containing the first alkali-metal atom group and a second alkali-metal atom group interacting via spin exchange with the first alkali-metal atom group, a probe light having a second wavelength different from the first wavelength to measure spin polarization of the second alkali-metal atom group is made to enter the cell to form the same optical axis as the pump light, a wavelength discrimination unit is provided to discriminate between the pump light and the probe light that passed through the cell depending on a different in wavelength, and the rotation angle of a polarization plane of the probe light that passed through the cell is measured so that the degree of flexibility of the device layout can be increased.

Optically pumped magnetometer

A gradiometer in which a probe beam for reading sequentially passes through two magnetic field measurement regions to obtain signals according to magnetic flux densities of the respective regions is formed using an optically pumped magnetometer. In particular, in a gradiometer using a high sensitivity optically pumped magnetometer, a geometric arrangement enabling obtainment of a large signal from a dipole moment as a signal source is defined.

Magnetic gradiometer and magnetic sensing method

An optically pumped magnetometer and a magnetic sensing method acquire information as to strengths of magnetic fields in two different directions. A pump light having a circularly polarized component, first probe light having a liner polarized component and second probe light having a linearly polarized component are emitted to a cell containing a group of alkali metal atoms so as to form a crossing region A magnetic field applying unit applies a static magnetic field in a direction of the pump light incident on the crossing region during the emission of the pump light, the first probe light and the second probe light. And, information as to strengths of magnetic fields in two different directions perpendicular to the direction of the static magnetic field in the cell from the rotation angles of a polarization planes of the first and second probe lights during passage through the cell is calculated.

Optically pumped magnetometer and magnetic sensing method

The present invention provides a laser apparatus capable of improving a scan speed and achieving a scan rate equal to or more than 1 MHz, and an optical tomographic imaging apparatus using the laser apparatus as a light source. The laser apparatus includes a ring resonator, the ring resonator having a structure in which a first modulator, a normal dispersion region, a second modulator and an anomalous dispersion region are arranged in this order, and in this arrangement, a gain medium is included, and being configured so that modulation with respect to the second modulator can be caused to be phase modulation by periodically superimposing phase modulation on modulation with respect to the first modulator.

Laser apparatus, driving method of the same and optical tomographic imaging apparatus

An optical tomography imaging a tomogram by using a coherent light by a backscattering light of a measured object and a reflected light of a reference mirror, which has supercontinuum light sources, an optical system having group velocity dispersion connected to the supercontinuum light source, an optical detection element detecting a coherent light by a backscattering light of the measured object and a reflected light of the reference mirror, a timing detection element detecting a timing of each wavelength component in an output light from the optical system having the group velocity dispersion, and a unit sampling a signal from the optical detector by using a timing signal from the timing detection element with a signal from the supercontinuum light source as a trigger, and detecting an optical tomogram signal imaging a tomogram, thereby acquiring an optical tomogram at a higher speed than a conventional SS-OCT.

Optical tomography apparatus with timing detection element including optical resonator having variable resonator length

An atomic magnetometer includes a cell containing an atomic group, a pump light source, a probe light source, a mirror, and a detector. The cell is disposed between the pump light source and the mirror and between the probe light source and the detector. A pump beam emitted from the pump light source is circularly polarized light. The pump beam passes through the cell and is reflected by the mirror and then passes through the cell again. The probe beam emitted from the probe light source is linearly polarized light. An optical path of the probe beam is parallel to the plane of incidence of the pump beam and is also parallel to the surface of the mirror. The optical path of the probe beam crosses the optical path of the pump beam in the cell. The probe beam which has passed through the cell enters the detector.

Atomic magnetometer and magnetic force measuring method

Provided are a near field exposure mask which can suppress heat generation of a mask during exposure and can also suppress variation in size of a resist pattern for each shot, and a resist pattern forming method using the same. The near field exposure mask includes a transparent mask matrix l; a light shielding layer lformed above the transparent mask matrix land containing silicon; a reflective layer lformed between the transparent mask matrix land  the light shielding layer l; and an opening pattern provided in the reflective layer land the light shielding layer land being less in size than an exposure wavelength &#x3bb; (nm), wherein the reflectance at an interface between the transparent mask matrix land the reflective layer lis higher than a reflectance at an interface between a transparent mask matrix and a light shielding layer formed on the transparent mask matrix and containing silicon of a near field exposure mask which has no reflective layer between the transparent mask matrix and the light shielding layer.

Near field exposure mask, method of forming resist pattern using the mask, and method of producing device

A near-field exposure apparatus includes a near-field exposure mask and a mechanism places a substrate, to be exposed, opposed to the near-field exposure mask. A mechanism performs relative alignment of the near-field exposure mask and the substrate to be exposed. A mechanism closely contacts the near-field exposure mask and the substrate to be exposed, with each other. A mechanism projects exposure light to the near-field exposure mask, and a soft X-ray irradiating device removes static electricity charged in at least one of the near-field exposure mask and the substrate to be exposed. The soft X-ray irradiating device is disposed such that the near-field exposure mask is located between the soft X-ray irradiating device and the substrate to be exposed.

Near-field exposure apparatus and near-field exposure method

An exposure apparatus to be used with an exposure mask having an elastically deformable holding member and a light blocking film provided on the holding member and being formed with an opening pattern. For exposure, the mask is flexed, to be brought into contact with an object to be exposed. The apparatus includes a distance detecting device for detecting a distance between the exposure mask and the object to be exposed. The distance detecting device is adapted to detect the distance between the exposure mask and the object to be exposed before the exposure mask is flexed. The apparatus also includes a distance controlling device for controlling the distance between the exposure mask before the mask is flexed and the object to be exposed, on the basis of a signal from the distance detecting device.

Exposure apparatus, exposure method, and exposure mask

A near-field exposure method includes closely contacting an exposure mask having a light blocking film with small openings, to a photoresist layer formed on a substrate having surface unevenness, and projecting the exposure light of the exposure light source onto the exposure mask so that the photoresist is exposed based on near-field light escaping from the small openings, wherein the near-field exposure is carried out under a condition that a contact region where the light blocking film and the photoresist layer are in contact with each other and a liquid region filled with a liquid between the light blocking film and the photoresist layer coexist between the light blocking film and the photoresist layer.

Near-field exposure method

A sensor device is formed from a metal film having a plurality of openings, a sensor material positioned within each of the openings, a light source that emits light having a first wavelength, and a light detector that detects light emitted from the light source and transmitted through or reflected from the openings. The plurality of openings are arranged periodically in a first direction in the metal film, and both a size of each of the plurality of openings and an interval thereof in the first direction are equal to or less than the wavelength of the light.

Sensor device and testing method utilizing localized plasmon resonance

Provided are a photosensitive silane coupling agent for forming a low-defect microparticle pattern, dot array pattern, or hole array pattern through fewer steps, and a method of forming a pattern using such photosensitive silane coupling agent. Used is a photosensitive silane coupling agent comprising a 1,2-naphthoquinone-2-diazido-5-sulfonyl group or a 1,2-naphthoquinone-2-diazido-4-sulfonyl group.

Photosensitive silane coupling agent, method of modifying surface, method of forming pattern, and method of fabricating device

A near-field light generating method for irradiating light from a light source to a metal film having a fine opening that has a size of not more than a wavelength of the light emitted from the light source, and forming a fine light spot adjacent to the fine opening on a light outgoing side of the fine opening. The method includes providing the metal film with a rectangular fine opening whose length to width ratio is between 1.1 times and 2 times that of a standard square opening, obtained by increasing the length of the standard square opening, and irradiating the metal film with light from the light source to form the fine light spot, which has a length and a width that are substantially equal to those of the standard square opening, and where the fine light spot has a light intensity, which is not less than two times that of the standard square opening. This method is applicable in a corresponding near-field optical head, which can be included either in an optical microscope to observe a sample surface or in an apparatus for recording and reproducing with respect to a recording medium.

Near-field light generating method and near-field optical head using a light blocking metal film having a fine opening whose size is not more than a wavelength of irradiated light, and near-field optical microscope having the optical head

Disclosed is a near-field exposure mask having a light blocking layer formed on a substrate, the light blocking layer having an opening with an opening width narrower than a wavelength of an exposure light source, wherein exposure of an object to be exposed is carried out by use of near-field light to be produced at the opening while the exposure mask and the object to be exposed are placed in contact with each other, an important feature residing in that the light blocking layer is provided by a film that contains silicon in a range from 50% to 100% in terms of mole fraction.

Growing community of inventors

Tokyo, Japan

Natsuhiko Mizutani