Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Semiquest, Inc. (1 from 7 patents)
1 patent:
1. 7530880 - Method and apparatus for improved chemical mechanical planarization pad with pressure control and process monitor