Kionix, Inc.

Nathan L Stirling

Scott G Adams

James E Strait

June Shen-Epstein

Eric P Chojnacki

Nenad Nenadic

Luke E DeWalt

Vasile Nistor

A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices.

Single motor dynamic calibration unit

An oscillatory rate sensor is described for sensing rotation about the 'z-axis'. It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkages.

Z-axis angular rate sensor

Growing community of inventors

King Ferry, NY, United States of America

Nathan L Stirling