Entegris, Inc.

Mykrolis Corporation

Nathan Abbott

Christopher J Vroman

Rajnikant B Patel

Eric McNamara

Anthony DiPrizio

Christopher Vroman

Embodiments of the present invention provide low-profile surface mount filters. One embodiment of the present invention includes a filter housing adapted to mount on a substrate block having a plurality of flow paths and a filter cavity defined therein. The filter cavity is defined to extend in a generally horizontal direction when the low-profile filter is in use. A first flow passage is defined to connect an inlet of the filter housing to a first section of the filter cavity and a second flow passage is defined to connect a second section of the filter cavity to an outlet of the filter housing. A filter assembly is disposed in the filter cavity and sealed to the surface of the filter cavity separating the filter cavity into adjacent sections including the first section of the filter cavity and second section of the filter cavity.

Low-profile surface mount filter

A gas porous media which comprises a material having a low coefficient of thermal expansion that is capable of retaining 99.99% or more of particles of a size of about 0.003 microns and larger at 0.2 slpm/cmwhile demonstrating a permeability of 3.5&#xd7;10mand a porosity of around 62% is disclosed. The porous media can be fabricated into a frame that is capable of retaining 99.9999999% of particles greater than 0.003 &#x3bc;m in diameter at 8.3 sccm/cmwith a permeability of 3.0&#xd7;10mand a porosity of around 53%. The porous medias can be tailored by changing the raw materials and process to yield media with a range of porosities and that exhibit permeability between 1.0Eand 1.0Em. The porous media are used in frames for supporting a pellicle and a reticle in a parallel relationship to each other. The frames may comprise porous media in its entirety or the porous media can be fabricated and sealed into a solid support frame.

Membrane and reticle-pellicle apparatus with purged pellicle-to-reticle gap using same

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Rindge, NH, United States of America

Nathan Abbott